Spring constants of composite ceramic/gold cantilevers for scanning probe microscopy

Thin Solid Films

Volumn 339, Issue 1-2, 1999, Pages 249-257

  Hazel, John L ^a   Tsukruk, Vladimir V ^a  

^a Parkview Campus   (United States)

Author keywords

Atomic force; Elastic properties; Surface energy; Tribology

Indexed keywords

CALIBRATION; CANTILEVER BEAMS; ELASTIC MODULI; FINITE ELEMENT METHOD; GOLD; INTERFACIAL ENERGY; NATURAL FREQUENCIES; SILICON NITRIDE; TRIBOLOGY;

FRICTION FORCE MODEL; SCANNING PROBE MICROSCOPY (SPM); SPRING CONSTANTS;

COMPOSITE MATERIALS;

EID: 0033534977     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00961-4     Document Type: Article

References (36)

1. G. Binnig, C.F. Quate, Ch. Gerber, Phys. Rev. Lett., 12 (1986) 930.
2. C.M. Mate, G.M. McClelland, R. Erlandsson, S. Chiang, Phys. Rev. Lett. 59 (1987) 1942.
3. B. Ratner, V.V. Tsukruk, Scanning Probe Microscopy in Polymers, ACS Symposium Series, Washington DC, 1998, p. 694.
4. B. Bhushan, Micro/Nanotribology and its Applications, Kluwer Acad. Press, Dorddecht, Netherlands, 1997.
5. V.V. Tsukruk, D.H. Reneker, Polymer 36 (1995) 1791.
6. V.V. Tsukruk, Rubber Chem. Tech. 70 (3) (1997) 430.
7. N.A. Burnham, R.J. Colton, H.M. Pollock, Nanotechnology 4 (1993) 64.
8. D.K. Schwartz, R. Viswanathan, J.A. Zasadzinski, Langmuir 9 (1993) 1384.
9. V.V. Tsukruk, D.H. Reneker Macromolecules 28 (1995) 1370.
10. J.E. Frommer, Thin Solid Films 273 (1996) 112.
11. V.V. Tsukruk, V.N. Bliznyuk, Langmuir 14 (1998) 446.
12. A. Noy, D.V. Vezenov, C.M. Lieber Annu. Rev. Mater. Sci. 27 (1997) 381.
13. V.V. Tsukruk, M.P. Everson, L.M. Lander, W.J. Brittain, Langmuir 12 (1996) 3905.
14. V.V. Tsukruk, V.N. Bliznyuk, D. Visser, J. Hazel, Tribology Letters, 2, (1996) 71.
15. V.V. Tsukruk, V.N. Bliznyuk, J. Hazel, D. Visser, M.P. Everson, Langmuir 12 (1996) 4840.
16. V.V. Tsukruk, V.N. Bliznyuk, D.H. Reneker, Thin Solid Films 244 (1994) 745.
17. V.V. Tsukruk, V.N. Bliznyuk, D.W. Visser, A.L. Campbell, T. Bunning, W.W. Adams, Macromolecules 30 (1997) 6615.
18. J.-A. Ruan, B. Bhushan, J. Tribology 116 (1994) 378.
19. J.E. Sader, Rev. Sci. Instrum. 66 (1995) 4583.
20. A. Noy, C.D. Frisbie, L.F. Rozsnyai, M.S. Wrighton, C.M. Lieber, J. Am. Chem. Soc. 117 (1995) 7943.
21. K.E. Peterson, C.R. Guarnieri, J. Appl. Phys. 50 (1979) 6761.
22. D.A. Walters, J.P. Cleveland, N.H. Thomson, P.K. Hansma, M.A. Wendman, G. Gurdey, V. Ellings, Rev. Sci. Instrum. 67 (1996) 3583.
23. T.R. Albrecht, S. Akamine, T.E. Carver, C.F. Quate, J. Vac. Sci. and Technol A8 (1990) 3386.
24. J. Cleveland, S. Manne, D. Bocek, P.K. Hansma, Rev. Sci. Instrum. 64 (1993) 403.
25. J. Cleveland, Spring Constant Update, Digital Instruments, Santa Barbara, CA, 1996, unpublished report.
26. J. Hazel, V.V. Tsukruk, Polymer Prep. 37 (2) (1996) 567.
27. M. Labardi, M. Allegrini, M. Salerno, C. Frediani, C. Ascoli, Appl. Phys. A74 (1994) 3.
28. J.M. Neumeister, W.A. Ducker, Rev. Sci. Instrum. 65 (1994) 2527.
29. D.F. Ogletree, R.W. Carpick, M. Salmeron, Rev. Sci. Instrum. 67 (1996) 3298.
30. J.E. Sader, I. Larson, P. Mulvaney, and L.R. White, 66 (1995) 3789
31. R.J. Warmack, X.-Y. Zheng, T. Thundat, D.P. Allison, Rev. Sci. Instrum. 65 (1994) 394.
32. H.-J. Butt, P. Siedle, K. Seifert, et al., J. Microscopy 169 (1993) 75.
33. T. Senden, W. Ducker, Langmuir 10 (1994) 1003.
34. D. Elliot, Microlithography: Process Technology for IC Fabrication, Halliday, NY, 1986.
35. F.P. Beer, E.R., Johnson Jr., Mechanics of Materials, McGraw Hill, NY, 1981.
36. S. Jahanmir, Friction and Wear of Ceramics, Marcel Dekker, NY, 1994.