메뉴 건너뛰기




Volumn 51, Issue 7, 2004, Pages 1192-1196

Gate oxide reliability under ESD-like pulse stress

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DISCHARGE; GATE OXIDE; OXIDE BREAKDOWN; TIME DEPENDENT DIELECTRIC BREAKDOWN;

EID: 4344610614     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2004.829894     Document Type: Article
Times cited : (19)

References (40)
  • 1
    • 4344599335 scopus 로고
    • Modeling the effects of narrow impulse overstress on capacitive test structures
    • M. Bridgewood and R. Kelly, "Modeling the effects of narrow impulse overstress on capacitive test structures," in Proc. EOS/ESD Symp., 1985, pp. 84-91.
    • (1985) Proc. EOS/ESD Symp. , pp. 84-91
    • Bridgewood, M.1    Kelly, R.2
  • 2
    • 0023013298 scopus 로고
    • ESD pulse and continuous voltage breakdown in MOS capacitor structures
    • A. Amerasekera and D. Campbell, "ESD pulse and continuous voltage breakdown in MOS capacitor structures," in Proc. EOS/ESD Symp., 1986, pp. 208-213.
    • (1986) Proc. EOS/ESD Symp. , pp. 208-213
    • Amerasekera, A.1    Campbell, D.2
  • 3
    • 0023548137 scopus 로고
    • The effect of high electric field transients on thin gate oxide MOSFETs
    • Y. Fong and C. Hu, "The effect of high electric field transients on thin gate oxide MOSFETs," in Proc. EOS/ESD Symp., 1987, pp. 252-257.
    • (1987) Proc. EOS/ESD Symp. , pp. 252-257
    • Fong, Y.1    Hu, C.2
  • 4
    • 0024170254 scopus 로고
    • Designing MOS inputs and outputs to avoid oxide failure in the charged device model
    • T. Maloney, "Designing MOS inputs and outputs to avoid oxide failure in the charged device model," in Proc. EOS/ESD Symp., 1988, pp. 220-227.
    • (1988) Proc. EOS/ESD Symp. , pp. 220-227
    • Maloney, T.1
  • 5
    • 0033279806 scopus 로고    scopus 로고
    • Analyzing the switching behavior of ESD-protection transistors by very fast transmission line pulsing
    • H. Wolf, H. Gieser, and W. Wilkening, "Analyzing the switching behavior of ESD-protection transistors by very fast transmission line pulsing," in Proc. EOS/ESD Symp., 1999, pp. 28-37.
    • (1999) Proc. EOS/ESD Symp. , pp. 28-37
    • Wolf, H.1    Gieser, H.2    Wilkening, W.3
  • 6
    • 0034538958 scopus 로고    scopus 로고
    • Breakdown and latent damage of ultrathin gate oxides under ESD stress conditions
    • J. Wu, P. Juliano, and E. Rosenbaum, "Breakdown and latent damage of ultrathin gate oxides under ESD stress conditions," in Proc. EOS/ESD Symp., 2000, pp. 287-293.
    • (2000) Proc. EOS/ESD Symp. , pp. 287-293
    • Wu, J.1    Juliano, P.2    Rosenbaum, E.3
  • 8
    • 0034548148 scopus 로고    scopus 로고
    • Chip-level simulation for CDM failures in multi-power IC's
    • J. Lee, Y. Huh, J. Chen, P. Bendix, and S. Kang, "Chip-level simulation for CDM failures in multi-power IC's," in Proc. EOS/ESD Symp., 2000, pp. 456-464.
    • (2000) Proc. EOS/ESD Symp. , pp. 456-464
    • Lee, J.1    Huh, Y.2    Chen, J.3    Bendix, P.4    Kang, S.5
  • 9
    • 4444312067 scopus 로고    scopus 로고
    • Workshop on on-chip protection for RF technologies
    • E. Worley, "Workshop on On-Chip Protection for RF Technologies," in Proc. 2003 EOS/ESD Symp.
    • Proc. 2003 EOS/ESD Symp.
    • Worley, E.1
  • 10
    • 0032309715 scopus 로고    scopus 로고
    • Simulation of complete CMOS I/O circuit response to CDM stress
    • S. G. Beebe, "Simulation of complete CMOS I/O circuit response to CDM stress," in Proc. EOS/ESD Symp., 1998, pp. 259-270.
    • (1998) Proc. EOS/ESD Symp. , pp. 259-270
    • Beebe, S.G.1
  • 11
    • 0030398616 scopus 로고    scopus 로고
    • Very-fast transmission line pulsing of integrated structure and the charged device model
    • H. Gieser and M. Haunschild, "Very-fast transmission line pulsing of integrated structure and the charged device model," in Proc. EOS/ESD Symp., 1996, pp. 85-94.
    • (1996) Proc. EOS/ESD Symp. , pp. 85-94
    • Gieser, H.1    Haunschild, M.2
  • 13
    • 0042786086 scopus 로고    scopus 로고
    • Electron energy dependence of metal-oxide-semiconductor degradation
    • D. J. DiMaria and J. H. Stathis, "Electron energy dependence of metal-oxide-semiconductor degradation," Appl. Phys. Lett., vol. 75, no. 16, pp. 2427-2428, 1999.
    • (1999) Appl. Phys. Lett. , vol.75 , Issue.16 , pp. 2427-2428
    • DiMaria, D.J.1    Stathis, J.H.2
  • 14
    • 0033741528 scopus 로고    scopus 로고
    • Experimental evidence for voltage driven breakdown models in ultrathin gate oxides
    • P. E. Nicollian, W. R. Hunter, and J. C. Hu, "Experimental evidence for voltage driven breakdown models in ultrathin gate oxides," in Proc. IRPS, 2000, pp. 7-15.
    • (2000) Proc. IRPS , pp. 7-15
    • Nicollian, P.E.1    Hunter, W.R.2    Hu, J.C.3
  • 16
    • 0033741471 scopus 로고    scopus 로고
    • Analysis of oxide breakdown mechanism occurring during ESD pulses
    • C. Leroux, P. Andreucci, and G. Reimbold, "Analysis of oxide breakdown mechanism occurring during ESD pulses," in Proc. Int. Rel. Phys. Symp., 2000, pp. 276-282.
    • (2000) Proc. Int. Rel. Phys. Symp. , pp. 276-282
    • Leroux, C.1    Andreucci, P.2    Reimbold, G.3
  • 17
    • 0026406199 scopus 로고
    • Nonuniform ESD current distribution due to improper metal routing
    • G. Krieger, "Nonuniform ESD current distribution due to improper metal routing," in Proc. EOS/ESD Symp., 1991, pp. 104-109.
    • (1991) Proc. EOS/ESD Symp. , pp. 104-109
    • Krieger, G.1
  • 18
    • 0026834387 scopus 로고
    • TDDB on poly-gate single doping type capacitors
    • S.-J. Wang, I.-C. Chen, and H. L. Tigelaar, "TDDB on poly-gate single doping type capacitors," in Proc. IRPS, 1992, pp. 54-57.
    • (1992) Proc. IRPS , pp. 54-57
    • Wang, S.-J.1    Chen, I.-C.2    Tigelaar, H.L.3
  • 20
    • 0033733540 scopus 로고    scopus 로고
    • Field acceleration for oxide breakdown - Can an accurate anode hole injection model resolve the E versus 1/E controversy?
    • M. Alam, J. Bude, and A. Ghetti, "Field acceleration for oxide breakdown - Can an accurate anode hole injection model resolve the E versus 1/E controversy?," in Proc. IEEE. Int. Rel. Phys. Symp., 2000, pp. 21-26.
    • (2000) Proc. IEEE. Int. Rel. Phys. Symp. , pp. 21-26
    • Alam, M.1    Bude, J.2    Ghetti, A.3
  • 22
    • 4344707391 scopus 로고    scopus 로고
    • private communication
    • S. Voldman, private communication.
    • Voldman, S.1
  • 23
    • 0031653670 scopus 로고    scopus 로고
    • Constant current charge-to-breakdown: Still a valid tool to study the reliability of MOS structures?
    • T. Nigam, R. Degraeve, G. Groeseneken, M. Heyns, and H. Maes, "Constant current charge-to-breakdown: Still a valid tool to study the reliability of MOS structures?," in IEEE Int. Rel. Phys. Symp., 1998, pp. 62-69.
    • (1998) IEEE Int. Rel. Phys. Symp. , pp. 62-69
    • Nigam, T.1    Degraeve, R.2    Groeseneken, G.3    Heyns, M.4    Maes, H.5
  • 24
    • 0032188567 scopus 로고    scopus 로고
    • Polarity-dependent tunneling current and oxide breakdown in dual-gate CMOSFETs
    • Oct
    • Y. Shi, T. P. Ma, S. Prasad, and S. Dhanda, "Polarity-dependent tunneling current and oxide breakdown in dual-gate CMOSFETs," IEEE Electron Device Lett., vol. 19, pp. 391-393, Oct. 1998.
    • (1998) IEEE Electron Device Lett. , vol.19 , pp. 391-393
    • Shi, Y.1    Ma, T.P.2    Prasad, S.3    Dhanda, S.4
  • 26
    • 0031094623 scopus 로고    scopus 로고
    • Heat transport in thin dielectric films
    • S. M. Lee and D. G. Cahill, "Heat transport in thin dielectric films," J. Appl. Phys., vol. 81, no. 6, pp. 2590-2595, 1997.
    • (1997) J. Appl. Phys. , vol.81 , Issue.6 , pp. 2590-2595
    • Lee, S.M.1    Cahill, D.G.2
  • 27
    • 4344692705 scopus 로고    scopus 로고
    • private communication
    • D. Cahill, private communication.
    • Cahill, D.1
  • 30
    • 21544467967 scopus 로고
    • Trap generation in silicon dioxide produced by hot electrons
    • D. J. DiMaria and J. W. Stasiak, "Trap generation in silicon dioxide produced by hot electrons," J. Appl. Phys., vol. 65, pp. 2342-2350, 1989.
    • (1989) J. Appl. Phys. , vol.65 , pp. 2342-2350
    • DiMaria, D.J.1    Stasiak, J.W.2
  • 31
    • 0025426274 scopus 로고
    • Thermal failure in semiconductor devices
    • V. M. Dwyer, A. J. Franklin, and D. S. Campbell, "Thermal failure in semiconductor devices," Solid State Electron., vol. 33, no. 5, pp. 553-560, 1990.
    • (1990) Solid State Electron. , vol.33 , Issue.5 , pp. 553-560
    • Dwyer, V.M.1    Franklin, A.J.2    Campbell, D.S.3
  • 32
    • 0024766460 scopus 로고
    • Temperature acceleration of time-dependent dielectric breakdown
    • Nov
    • R. Moazzami, J. C. Lee, and C. Hu, "Temperature acceleration of time-dependent dielectric breakdown," IEEE Trans. Electron Devices, vol. 36, pp. 2462-2465, Nov. 1989.
    • (1989) IEEE Trans. Electron Devices , vol.36 , pp. 2462-2465
    • Moazzami, R.1    Lee, J.C.2    Hu, C.3
  • 33
    • 0033342074 scopus 로고    scopus 로고
    • Explanation of soft and hard breakdown and its consequences for area scaling
    • M. A. Alam, B. Weir, J. Bude, P. Silverman, and D. Monroe, "Explanation of soft and hard breakdown and its consequences for area scaling," in IEDM Tech. Dig., 1999, pp. 449-452.
    • (1999) IEDM Tech. Dig. , pp. 449-452
    • Alam, M.A.1    Weir, B.2    Bude, J.3    Silverman, P.4    Monroe, D.5
  • 34
    • 21544458715 scopus 로고
    • Impact ionization, trap creation, degradation, and breakdown in silicon dioxide films on silicon
    • D. J. DiMaria, E. Cartier, and D. Arnold, "Impact ionization, trap creation, degradation, and breakdown in silicon dioxide films on silicon," J. Appl. Phys., vol. 73, no. 7, pp. 3367-3384, 1993.
    • (1993) J. Appl. Phys. , vol.73 , Issue.7 , pp. 3367-3384
    • DiMaria, D.J.1    Cartier, E.2    Arnold, D.3
  • 35
    • 0028430427 scopus 로고
    • 2 breakdown model for very low voltage lifetime extrapolation
    • May
    • 2 breakdown model for very low voltage lifetime extrapolation," IEEE Trans. Electron Devices, vol. 41, pp. 761-766, May 1994.
    • (1994) IEEE Trans. Electron Devices , vol.41 , pp. 761-766
    • Schuegraf, K.F.1    Hu, C.2
  • 36
    • 0008536196 scopus 로고    scopus 로고
    • New insights in the relation between electron trap generation and the statistical properties of oxide breakdown
    • Apr
    • R. Degraeve, G. Groeseneken, R. Bellens, J. L. Ogier, M. Depas, P. J. Roussel, and H. E. Maes, "New insights in the relation between electron trap generation and the statistical properties of oxide breakdown," IEEE Trans. Electron Devices, vol. 45, pp. 904-910, Apr. 1998.
    • (1998) IEEE Trans. Electron Devices , vol.45 , pp. 904-910
    • Degraeve, R.1    Groeseneken, G.2    Bellens, R.3    Ogier, J.L.4    Depas, M.5    Roussel, P.J.6    Maes, H.E.7
  • 37
    • 33744905856 scopus 로고
    • Mechanism for stress-induced leakage currents in thin silicon dioxide films
    • D. J. DiMaria and E. Cartier, "Mechanism for stress-induced leakage currents in thin silicon dioxide films," J. Appl. Phys., vol. 78, no. 6, pp. 3883-3894, 1995.
    • (1995) J. Appl. Phys. , vol.78 , Issue.6 , pp. 3883-3894
    • DiMaria, D.J.1    Cartier, E.2
  • 39
    • 0027811720 scopus 로고
    • Silicon dioxide breakdown lifetime enhancement under bipolar bias conditions
    • Dec
    • E. Rosenbaum, Z. Liu, and C. Hu, "Silicon dioxide breakdown lifetime enhancement under bipolar bias conditions," IEEE Trans. Electron Devices, vol. 40, p. 2287, Dec. 1993.
    • (1993) IEEE Trans. Electron Devices , vol.40 , pp. 2287
    • Rosenbaum, E.1    Liu, Z.2    Hu, C.3
  • 40
    • 0031233975 scopus 로고    scopus 로고
    • Simulating process-induced gate oxide damage in circuits
    • Sept
    • R. Tu, J. King, H. Shin, and C. Hu, "Simulating process-induced gate oxide damage in circuits," IEEE Trans. Electron Devices, vol. 44, pp. 1393-1400, Sept. 1997.
    • (1997) IEEE Trans. Electron Devices , vol.44 , pp. 1393-1400
    • Tu, R.1    King, J.2    Shin, H.3    Hu, C.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.