Analysis of oxide breakdown mechanism occurring during ESD pulses

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 2000, Pages 276-282

  Leroux, C ^a   Andreucci, P ^a   Reimbold, G ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; DIELECTRIC MATERIALS; ELECTRIC BREAKDOWN OF SOLIDS; ELECTRIC DISCHARGES; ELECTROSTATICS; FAILURE ANALYSIS; MATHEMATICAL MODELS; OXIDES;

ELECTROSTATIC DISCHARGES;

MOS DEVICES;

EID: 0033741471     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (14)