Simulation of moving microbeams with the direct simulation Monte Carlo method

33rd AIAA Fluid Dynamics Conference and Exhibit

Volumn , Issue , 2003, Pages

  Gallis, M A ^a   Torczynski, J R ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; GAS DYNAMICS; NAVIER STOKES EQUATIONS;

BEAM MOTION; DIRECT SIMULATION MONTE CARLO; DIRECT SIMULATION MONTE CARLO METHOD; MICRO BEAMS; MOLECULAR GAS DYNAMICS; NAVIER STOKES; OUT-OF-PLANE MOTION; SLIP BOUNDARY CONDITIONS;

MONTE CARLO METHODS;

EID: 85087601950     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2514/6.2003-4013     Document Type: Conference Paper

References (19)

1. Karniadakis, G. E., and Beskok, A., Micro Flows: Fundamentals and Simulation, Springer-Verlag, New York, NY, 2002, Sections 2.3 and 7.1.
2. Veijola, T., Kuisma, H., Lahdenperä, J., and Ryhänen, T., "Equivalent-Circuit Model of the Squeezed Gas Film in a Silicon Accelerometer," Sensors and Actuators A, Vol. 48, 1995, pp. 239-248.
3. Corman, T., Enoksson, P., and Stemme, G., "Gas Damping of Electrostatically Excited Resonators," Sensors and Actuators A, Vol. 61, 1997, pp. 249-255.
4. Veijola, T., Kuisma, H., Lahdenperä, J., and Ryhänen, T., "Simulation Model for Micromechanical Angular Rate Sensor," Sensors and Actuators A, Vol. 60, 1997, pp. 113-121.
5. Veijola, T., Kuisma, H., and Lahdenperä, J., "The Influence of Gas-Surface Interaction on Gas-Film Damping in a Silicon Accelerometer," Sensors and Actuators A, Vol. 66, 1998, pp. 83-92.
6. Veijola, T., Corman, T., Enoksson, P., and Stemme, G., "Dynamic Simulation Model for a Vibrating Fluid Density Sensor," Sensors and Actuators, Vol. 76, 1999, pp. 213-224.
7. Veijola, T., and Turowski, M., "Compact Damping Models for Laterally Moving Microstructures with Gas-Rarefaction Effects," Journal of MicroElectro- Mechanical Systems, Vol. 10, No. 2, 2001, pp. 263-273.
8. Chang, K.-M., Lee, S.-C., and Li, S.-H., "Squeeze Film Damping Effect on a MEMS Torsion Mirror," Journal of Micromechanics and Microengineering, Vol. 12, 2002, pp. 556-561.
9. Yang, Y.-J., and Cheh-Jia, Y., "Macromodel Extraction of Gas Damping Effects for Perforated Surfaces with Arbitrarily-Shaped Geometries," in Technical Proceedings of the NanoTech 2002 International Conference on Modeling and Simulation of Microsystems, Computational Publications, Cambridge, MA, 2002, pp. 178-181.
10. Mehner, J., Kurth, S., Billep, D., Kaufmann, C., Kehr, K., and Dötzel, W., "Simulation of Gas Damping in Microstructures with Nontrivial Geometries," in 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems, Institute of Electrical and Electronics Engineers, New York, NY, 1998, pp. 172-177.
11. Schrag, G., Voigt, P., and Wachutka G."Squeeze Film Damping in Arbitrary Shaped Microdevices Modelled by an Accurate Mixed Level Scheme," in Technical Proceedings of the NanoTech 2001 International Conference on Modeling and Simulation of Microsystems, Computational Publications, Cambridge, MA, 2001, pp. 92-95.
12. Sattler, R., Schrag, G., and Wachutka, G., "Physically- Based Damping Model for Highly Perforated and Largely Deflected Torsional Actuators," in Technical Proceedings of the NanoTech 2002 International Conference on Modeling and Simulation of Microsystems, Computational Publications, Cambridge, MA, 2002, pp. 124-127.
13. Torczynski, J. R., Gallis, M. A., and Piekos, E. S., "Comparison of Methods for Simulating Gas Forces on Moving Microbeams," paper IMECE2002- 33788, American Society of Mechanical Engineers, New York, NY, 2002.
14. Bird, G. A., Molecular Gas Dynamics and the Direct Simulation of Gas Flows, Clarendon Press, Oxford, 1998, Chapters 2, 6, and 7 and Appendices A and F.
15. Bartel, T. J., Plimpton, S. J., and Gallis, M. A., Icarus: A 2-D Direct Simulation Monte Carlo (DSMC) Code for Multi-Processor Computers: User's Manual - V 10.0, Report SAND2001-2901, Sandia National Laboratories, Albuquerque, NM, 2001.
16. Ritchey, M. B., and Duesterhaus, M. A., private communications, Sandia National Laboratories, Albuquerque, NM, 2002.
17. Happel, J., and Brenner, H., Low Reynolds Number Hydrodynamics, Martinus Nijhoff, The Hague, 1983, pp. 52-55.
18. Fluent, Inc., FIDAP User's Manuals, version 8, Fluent, Inc., Lebanon, NH, 1998.
19. White, F. M., Heat Transfer, Addison-Wesley, Reading, MA, 1984, Appendix G.