OTS-templated cobalt deposition using Co2(CO)8 precursor

Solid State Phenomena

Volumn 124-126, Issue PART 1, 2007, Pages 531-534

  Lee, Jeonggil ^a   Park, Heejung ^a   Lee, Jaegab ^a  

^a Kookmin University   (South Korea)

Author keywords

MOCVD Co; SAMs(self assembled monolayers)

Indexed keywords

COBALT COMPOUNDS; GLASS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SELF ASSEMBLED MONOLAYERS; THERMAL EFFECTS;

ADSORPTION SITES; GLASS SURFACES; PROCESSING PRESSURE;

THIN FILMS;

EID: 38549166404     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/3-908451-31-0.531     Document Type: Conference Paper

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