Improvement of nanocrystalline diamond film growth process using pulsed Ar/H2/CH4 microwave discharges

Journal of Physics D: Applied Physics

Volumn 37, Issue 22, 2004, Pages

  Bruno, P ^a,b   Benedic F ^a   Mohasseb, F ^a   Lombardi, G ^a   Silva, F ^a   Hassouni, K ^a  

^a UNIVERSITÉ PARIS 13   (France)

^b UNIVERSITY OF BARI   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DEGREES OF FREEDOM (MECHANICS); ELECTRIC DISCHARGES; ENERGY DISSIPATION; FILM GROWTH; MATHEMATICAL MODELS; MICROWAVES; NANOSTRUCTURED MATERIALS; POLYCRYSTALLINE MATERIALS;

MICROWAVE DISCHARGES; MOLE FRACTIONS; NANOCRYSTALLINE DIAMOND (NCD) FILMS; PULSED DISCHARGES;

DIAMONDS;

EID: 10044268772     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/22/L01     Document Type: Article

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