Evaluation research of polishing methods for large area diamond films produced by chemical vapor deposition

Diamond and Related Materials

Volumn 16, Issue 2, 2007, Pages 253-261

  Tsai, H Y ^a   Ting, C J ^b,c   Chou, C P ^b  

^a NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Catalytic reaction assisted grinding; Chemical assisted mechanical polishing; Diamond film polishing; Thermo chemical polishing

Indexed keywords

CHEMICAL VAPOR DEPOSITION; LASER ABLATION; MICROWAVES; PLASMAS; POLISHING;

CATALYTIC REACTION ASSISTED GRINDING; CHEMICAL ASSISTED MECHANICAL POLISHING; DIAMOND FILM POLISHING; THERMO CHEMICAL POLISHING;

DIAMOND FILMS;

EID: 33846332815     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.06.007     Document Type: Article

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