Effect of diamond nucleation process on propagation losses of AlN/diamond SAW filter

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 51, Issue 12, 2004, Pages 1704-1708

  Elmazria, Omar ^a   El Hakiki, Mohamed ^a   Mortet, Vincent ^b,d   Assouar, Badreddine M ^a   Nesládek, Milos ^c,d   Vanecek, Milan ^b   Bergonzo, Philippe ^e   Alnot, Patrick ^a  

^a INSTITUT JEAN LAMOUR   (France)

^b INSTITUTE OF PHYSICS   (Czech Republic)

^c IMEC   (Belgium)

^d HASSELT UNIVERSITY   (Belgium)

^e CEA SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; DEPOSITION; DIAMONDS; NUCLEATION; OXIDATION; SURFACE ROUGHNESS; ULTRASONICS; VIBRATION CONTROL;

DIAMOND DEPOSITION; DIAMOND NUCLEATION; PHASE VELOCITY; PROPAGATION LOSSES;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 12344257518     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2004.1386688     Document Type: Article

References (13)

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