Fabrication of microstructures on the surface of a micro/hollow target ball by AFM

Journal of Micromechanics and Microengineering

Volumn 18, Issue 3, 2008, Pages

  Yan, Y D ^a   Sun, T ^a   Zhao, X S ^a   Hu, Z J ^a   Dong, S ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIAMONDS; GLASS; MACHINING;

INERTIAL CONFINEMENT FUSION (ICF); MECHANICAL SCRATCHING; MICRO INFLATION HOLES;

MICROSTRUCTURE;

EID: 42549153679     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/3/035002     Document Type: Article

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