Scanning and transmission electron microscopies of single-crystal silicon microworn/machined using atomic force microscopy

Journal of Materials Research

Volumn 12, Issue 12, 1997, Pages 3219-3224

  Koinkar, Vilas N ^a,b   Bhushan, Bharat ^a  

^a OHIO STATE UNIVERSITY   (United States)

^b ROHM AND HAAS COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRACK PROPAGATION; DISLOCATIONS (CRYSTALS); MICROMACHINING; PLASTIC DEFORMATION; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SINGLE CRYSTALS; TRANSMISSION ELECTRON MICROSCOPY;

MICROWORN SINGLE CRYSTAL SILICON;

SILICON;

EID: 0031332581     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0421     Document Type: Article

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