Nanomachining on Si (100) surface using an atomic force microscope with a lateral force transducer

2003 Nanotechnology Conference and Trade Show - Nanotech 2003

Volumn 1, Issue , 2003, Pages 534-537

  Ichida, Y ^a   Morimoto, Y ^a   Sato, R ^a   Murakami, M ^a  

^a UTSUNOMIYA UNIVERSITY   (Japan)

Author keywords

Atomic force microscope; Lateral force transducer; Nanomachining; Nanoscale scratching; Single crystal silicon

Indexed keywords

ATOMIC FORCE MICROSCOPY; FORCE MEASUREMENT; PARAMETER ESTIMATION; PIEZOELECTRIC DEVICES; PLASTIC DEFORMATION; SENSORS; SILICON; SURFACE TENSION; TRANSDUCERS;

LATERAL FORCE TRANSDUCER; NANOMACHINING; NANOSCALE SCRATCHING; SINGLE CRYSTAL SILICON;

SINGLE CRYSTALS;

EID: 6344278279     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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2. L. Tsau, D. Wang and K. L. Wang, "Nanometer Scale Patterning of Silicon (100) Surfaces by an Atomic Force Microscope Operating in Air," Appl. Phys. Lett., 64, 2133, 1994.
3. M. Wendel, S. Kühn, H. Lorenz and J. P. Kotthaus, "Nanolithography with an Atomic Force Microscope for Integrated Fabrication of Quantum Electronic Devices," Appl. Phys. Lett., 65, 1775, 1994.
4. S. Tegen, B. Kracke and B. Damaschke, "Surface Modifications with a Scanning Force Microscope," Rev. Sci. Instrum., 63, 1458, 1997.
5. st euspen Topical Conf. on Fabrication and Metrology in Nanotechnology, 1, 206, 2000.