Investigation on AFM-based micro/nano-CNC machining system

International Journal of Machine Tools and Manufacture

Volumn 47, Issue 11, 2007, Pages 1651-1659

  Yan, Yongda ^a   Sun, Tao ^a   Liang, Yingchun ^a   Dong, Shen ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Atomic force microscope (AFM); Micro nano structures; Precision stage; Scratching

Indexed keywords

ATOMIC FORCE MICROSCOPY; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; OXIDATION;

PRECISION STAGE; SCRATCHING;

MACHINING;

EID: 34247377811     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2007.01.008     Document Type: Article

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