EBL- and AFM-based techniques for nanowires fabrication on Si/SiGe

Materials Science and Engineering C

Volumn 19, Issue 1-2, 2002, Pages 185-188

  Notargiacomo, A ^a   Giovine, E ^b   Evangelisti, F ^a,b   Foglietti, V ^b   Leoni, R ^b  

^a ROMA TRE UNIVERSITY   (Italy)

^b CNR   (Italy)

Author keywords

AFM; EBL; Nanofabrication; SiGe; Wires

Indexed keywords

NANOWIRES;

ATOMIC FORCE MICROSCOPY; ELECTRON BEAM LITHOGRAPHY; ETCHING; FABRICATION; SILICON ALLOYS; THIN FILMS;

MATERIALS SCIENCE;

FABRICATION; NANOWIRE;

EID: 0037005973     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0928-4931(01)00483-0     Document Type: Article

References (15)