Experimental study of drilling sub-10 μm holes in thin metal foils with femtosecond laser pulses

Applied Surface Science

Volumn 152, Issue 3, 1999, Pages 138-148

  Zhu, X ^a   Villeneuve, D M ^a   Naumov, A Yu ^a   Nikumb, S ^a   Corkum, P B ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DRILLING; LASER ABLATION; MATHEMATICAL MODELS; MICROMACHINING; PULSED LASER APPLICATIONS; SOLID STATE LASERS; ULTRAFAST PHENOMENA;

LASER PARAMETERS;

METAL FOIL;

EID: 0033222081     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00331-1     Document Type: Article

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