Surface transport kinetics in low-temperature silicon deposition determined from topography evolution

Physical Review B - Condensed Matter and Materials Physics

Volumn 65, Issue 3, 2002, Pages 1-8

  Bray, K R ^a   Parsons, G N ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4243616227     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.65.035311     Document Type: Article

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