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Journal of Materials Chemistry

Volumn 18, Issue 16, 2008, Pages 1903-1910

Hydroxyphenylbenzene derivatives as glass forming molecules for high resolution photoresists

(2) Ober, Christopher K b De Silva, Anuja a

a Department of Obstetrics Gynecology (United States)

b Cornell University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AROMATIC COMPOUNDS; CONFORMATIONS; GLASS MANUFACTURE; GLASS TRANSITION; LITHOGRAPHY; MOLECULAR STRUCTURE; THERMAL EFFECTS;

GLASS FORMING MOLECULES; HIGH RESOLUTION PHOTORESISTS; HYDROXYPHENYLBENZENES; MOLECULAR GLASSES;

MOLECULAR DYNAMICS;

EID: 41949139158 PISSN: 09599428 EISSN: 13645501 Source Type: Journal
DOI: 10.1039/b719108a Document Type: Article

Times cited : (32)

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