Analysis, and optimization of a CMOS vertical thermal actuator

DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

Volumn , Issue , 2003, Pages 214-217

  Mohamed, A ^a   Elsimary, H ^a   Ismail, M ^b  

^a ELECTRONICS RESEARCH INSTITUTE   (Egypt)

^b OHIO STATE UNIVERSITY   (United States)

Author keywords

Actuators; Capacitors; Circuits; Finite element methods; Micromechanical devices; Microstructure; Radio frequency; Semiconductor device modeling; Shape; Thermal expansion

Indexed keywords

EID: 84945981255     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DTIP.2003.1287039     Document Type: Conference Paper

References (6)

1. Clark T. Nguyen, "Microelectromechanical Components for Miniaturized Low-Power Communications." IEE MTT-S International Microwave Symposium RF MEMS workshop, Anaheim, CA, 1999.
2. H. Sehr, A.G. Evans, A. Brunnsch, and G. J. Ensell, "Design and Fabrication of a Novel Thermally actuated Vertical Bimorph Scanner for an Integrated AFM." Proc. of Spie Vol. 4019, 2000.
3. Huang Q. A., and Lee N. K. S. "Analytical Modeling and Optimization for a Laterally - Driven Polysilicon Thermal Actuator", Microsystem Tech., Vol. 5,1999.
4. Z.Feng, H. Zhang, W. Zhang, and B. Su, "MEMES - Based Variable Capacitor for Millimeter Wave Applications." Proc. of Solid-State Sensor and Actuator Workshop, California, U.S.A., June 2000.
5. H. Elsimary, A. Mohamed, M. Ismail, "1 GHz CMOS VCO Design for Wireless Application Using MEMS Technology", Special Issue of J. of Analog Integrated and Signal Processing, Aug. 2000.
6. Amal Mohamed, Hamed Elsimary, and Mohammed Ismail, "Design of MEMS Tunable Capacitor with all Metal Microstructure for RF Wireless Applications," Proceedings of the MSM'2000, San Diego, California, Mar. 2000.