Fabrication of PECVD-grown fluorinated hydrocarbon nanoparticles and circular nanoring arrays using nanosphere lithography

Applied Surface Science

Volumn 254, Issue 13, 2008, Pages 3758-3761

  Sarkar, D K ^a   Farzaneh, M ^a  

^a UNIVERSITÉ DU QUÉBEC À CHICOUTIMI   (Canada)

Author keywords

Nanodots; Nanorings; Nanosphere lithography; Plasma enhanced chemical vapor deposition

Indexed keywords

HYDROCARBONS; NANORINGS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYSTYRENES;

FLUORINATED HYDROCARBON; NANODOTS; NANOSPHERE LITHOGRAPHY;

NANOPARTICLES;

EID: 41749124546     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.11.053     Document Type: Article

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