Dielectric properties of sol-gel derived high-k titanium silicate thin films

Thin Solid Films

Volumn 515, Issue 11, 2007, Pages 4788-4793

  Sarkar, D K ^a   Brassard, D ^a   Khakani, M A El ^a   Ouellet, L ^b  

^a INSTITUT NATIONAL DE LA RECHERCHE SCIENTIFIQUE   (Canada)

^b DALSA Semiconductor Inc   (Canada)

Author keywords

Dielectric properties; Electrical properties and measurements; Fourier transform infrared spectroscopy (FTIR); High dielectric constant (High k); Sol gel; Titanium silicate

Indexed keywords

DIELECTRIC LOSSES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LEAKAGE CURRENTS; OPTIMIZATION; PERMITTIVITY; SOL-GELS; TITANIUM COMPOUNDS;

ABSORBANCE PEAK; HIGH DIELECTRIC CONSTANT; TITANIUM SILICATE;

THIN FILMS;

EID: 33847130146     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.155     Document Type: Article

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