The effect of added salts on the optical properties of water for high index immersion lithography fluids

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 2, 2008, Pages 506-513

  Taylor, J Christopher ^a,c   Costner, Elizabeth A ^a   Goh, Sumarlin ^a   Wojtczak, William ^b   Dewulf, Dean ^b   Willson, C Grant ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^b SACHEM Inc   (United States)

^c HEWLETT PACKARD COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH INDEX FLUIDS; IMMERSION LITHOGRAPHY; IONIC ADDITIVES; NUMERICAL APERTURE (NA);

ADDITIVES; FLUIDS; IMAGING SYSTEMS;

LITHOGRAPHY;

EID: 41549091829     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2839863     Document Type: Article

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