Amplification of the index of refraction of aqueous immersion fluids by ionic surfactants

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5753, Issue I, 2005, Pages 537-553

  Lee, Kwangjoo ^a   Kunjappu, Joy ^a   Jockusch, Steffen ^a   Turro, Nicholas J ^a   Widerschpan, Tatjana ^b   Zhou, Jianming ^c   Smith, Bruce W ^c   Zimmerman, Paul ^d   Conley, Will ^e  

^a Och Spine at New York Presbyterian Hospitals   (United States)

^b UNIVERSITY OF KARLSRUHE   (Germany)

^c Kate Gleason College of Engineering   (United States)

^d INTEL CORPORATION   (United States)

^e SEMATECH   (United States)

Author keywords

193 nm; CdCl 2; CTAC; Immersion photolithography; Index of refraction; Ionic surfactants; SDS

Indexed keywords

193 NM; CDCL2; CTAC; IMMERSION PHOTOLITHOGRAPHY; INDEX OF REFRACTION; IONIC SURFACTANTS; SDS;

CADMIUM COMPOUNDS; CONCENTRATION (PROCESS); MICELLES; PHOTOLITHOGRAPHY; POSITIVE IONS; REFRACTIVE INDEX; SURFACE ACTIVE AGENTS;

FLUIDS;

EID: 24644494389     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.606105     Document Type: Conference Paper

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