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Volumn 13, Issue 6, 2007, Pages 377-384

Gas-phase ion chemistry of GeH4/B2H6 mixtures

Author keywords

Diborane; Gas phase ion chemistry; Germane; Ion trap mass spectrometry; Semiconductors

Indexed keywords


EID: 41149168101     PISSN: 14690667     EISSN: None     Source Type: Journal    
DOI: 10.1255/ejms.902     Document Type: Article
Times cited : (1)

References (64)
  • 2
    • 0034738860 scopus 로고    scopus 로고
    • Thin-film PV manufacturing: Material costs and their optimization
    • doi: 10.1016/S0927-0248(00)00057-X
    • K. Zweibel, "Thin-film PV manufacturing: Material costs and their optimization", Sol. Energy Mater. Sol. Cells 63, 375 (2000). doi: 10.1016/S0927-0248(00)00057-X
    • (2000) Sol. Energy Mater. Sol. Cells , vol.63 , pp. 375
    • Zweibel, K.1
  • 3
    • 0032661966 scopus 로고    scopus 로고
    • Issues in thin film PV manufacturing cost reduction
    • doi: 10.1016/S0927-0248(99)00019-7
    • K. Zweibel, "Issues in thin film PV manufacturing cost reduction", Sol. Energy Mater. Sol. Cells 59, 1 (1999). doi: 10.1016/S0927-0248(99)00019-7
    • (1999) Sol. Energy Mater. Sol. Cells , vol.59 , pp. 1
    • Zweibel, K.1
  • 4
    • 33748995663 scopus 로고    scopus 로고
    • Atomically controlled processing for group IV semiconductors by chemical vapor deposition
    • doi: 10.1143/JJAP.45.6767
    • J. Murota, M. Sakuraba and B. Tillack, "Atomically controlled processing for group IV semiconductors by chemical vapor deposition", Jpn. J. Appl. Phys. 45, 6767 (2006). doi: 10.1143/JJAP.45.6767
    • (2006) Jpn. J. Appl. Phys , vol.45 , pp. 6767
    • Murota, J.1    Sakuraba, M.2    Tillack, B.3
  • 5
    • 33644931597 scopus 로고    scopus 로고
    • A study of Si/Ge selective epitaxial growth by experimental design approach
    • doi: 10.1016/j.tsf.2005.09.049
    • B.L. Tan and T.L. Tan, "A study of Si/Ge selective epitaxial growth by experimental design approach", Thin Solid Films 504, 95 (2006). doi: 10.1016/j.tsf.2005.09.049
    • (2006) Thin Solid Films , vol.504 , pp. 95
    • Tan, B.L.1    Tan, T.L.2
  • 6
    • 12744265235 scopus 로고    scopus 로고
    • Atomically controlled impurity doping in Si-based CVD epitaxial growth
    • J. Murota, M. Sakuraba and B. Tillack, "Atomically controlled impurity doping in Si-based CVD epitaxial growth", Mat. Res. Soc. Symp. Proc. 809, 201 (2004).
    • (2004) Mat. Res. Soc. Symp. Proc , vol.809 , pp. 201
    • Murota, J.1    Sakuraba, M.2    Tillack, B.3
  • 7
    • 17044431087 scopus 로고    scopus 로고
    • Low-temperature SiGe(C) epitaxial growth by ultraclean hot-wall low-pressure CVD
    • J. Murota and M. Sakuraba, "Low-temperature SiGe(C) epitaxial growth by ultraclean hot-wall low-pressure CVD", Proceedings - Electrochemical Society 2004-2007, 825 (2004).
    • (2004) Proceedings - Electrochemical Society , vol.2004-2007 , pp. 825
    • Murota, J.1    Sakuraba, M.2
  • 8
    • 17044363621 scopus 로고    scopus 로고
    • Ge & Ge+B infusion doping and deposition for ultra-shallow junction, blanket and localized SiGe or Ge formation on Cz and SOI wafers
    • 2004
    • J. Borland, J. Hautala, M. Tabat, M. Gwinn, T. Tetreault and W. Skinner, "Ge & Ge+B infusion doping and deposition for ultra-shallow junction, blanket and localized SiGe or Ge formation on Cz and SOI wafers", Proceedings - Electrochemical Society 2004-07, 769 (2004).
    • (2007) Proceedings - Electrochemical Society , vol.769
    • Borland, J.1    Hautala, J.2    Tabat, M.3    Gwinn, M.4    Tetreault, T.5    Skinner, W.6
  • 9
    • 10644290230 scopus 로고    scopus 로고
    • Growth kinetic and doping of Si and SiGe epi layers on fullsheet substrates
    • doi: 10.1016/j.mseb.2004.07.078
    • A. Talbot, G. Avenier, G. Vincent and D. Dutartre, "Growth kinetic and doping of Si and SiGe epi layers on fullsheet substrates", Mat. Sci. Eng. B 114/115, 318 (2004). doi: 10.1016/j.mseb.2004.07.078
    • (2004) Mat. Sci. Eng. B , vol.114-115 , pp. 318
    • Talbot, A.1    Avenier, G.2    Vincent, G.3    Dutartre, D.4
  • 10
    • 0037566125 scopus 로고    scopus 로고
    • y film deposited by ultraclean low-pressure CVD
    • doi: 10.1016/S0169-4332(03)00079-5
    • y film deposited by ultraclean low-pressure CVD", Appl. Surf. Sci. 212/213, 209 (2003). doi: 10.1016/S0169-4332(03)00079-5
    • (2003) Appl. Surf. Sci , vol.212-213 , pp. 209
    • Shim, H.1    Sakuraba, M.2    Tsuchiya, T.3    Murota, J.4
  • 11
    • 0036694287 scopus 로고    scopus 로고
    • Atomically controlled processing for group IV semiconductors
    • doi: 10.1002/sia.1332
    • J. Murota, T. Matsuura and M. Sakuraba, "Atomically controlled processing for group IV semiconductors", Surf. Interface Anal. 34, 432 (2002). doi: 10.1002/sia.1332
    • (2002) Surf. Interface Anal , vol.34 , pp. 432
    • Murota, J.1    Matsuura, T.2    Sakuraba, M.3
  • 16
    • 21144441429 scopus 로고    scopus 로고
    • Electrical behavior of in situ doped polysilicon films as influenced by the dopants
    • doi: 10.1007/s11180-005-0022-7
    • A.A. Kovalevskii, V.E. Borisenko, V.M. Borisevich and A.V. Dolbik, "Electrical behavior of in situ doped polysilicon films as influenced by the dopants", Russian Microelectronics 34, 140 (2005). doi: 10.1007/s11180-005-0022-7
    • (2005) Russian Microelectronics , vol.34 , pp. 140
    • Kovalevskii, A.A.1    Borisenko, V.E.2    Borisevich, V.M.3    Dolbik, A.V.4
  • 18
    • 41149096910 scopus 로고    scopus 로고
    • Semiconductor device having bipolar transistor and method for manufacturing the same
    • US Pat. Appl. Publ, 2004, CODEN: USXXCO US 2004056274 A1 20040325
    • H. Sato and T. Wakabayashi, "Semiconductor device having bipolar transistor and method for manufacturing the same", US Pat. Appl. Publ. (2004). CODEN: USXXCO US 2004056274 A1 20040325
    • Sato, H.1    Wakabayashi, T.2
  • 20
    • 0001020914 scopus 로고    scopus 로고
    • Role of surface chemistry in semiconductor thin film processing
    • doi: 10.1021/cr950236z
    • J.G. Ekerdt, Y.M. Sun, A. Szabo, G.J. Szulkzewski and J.M. White, "Role of surface chemistry in semiconductor thin film processing", Chem. Rev. 96, 1499 (1996). doi: 10.1021/cr950236z
    • (1996) Chem. Rev , vol.96 , pp. 1499
    • Ekerdt, J.G.1    Sun, Y.M.2    Szabo, A.3    Szulkzewski, G.J.4    White, J.M.5
  • 22
    • 0002660857 scopus 로고
    • Gas phase ion-molecule reactions of monogermane with oxygen and ammonia
    • doi: 10.1016/0022-328X(88)80637-5
    • P. Benzi, L. Operti, G.A. Vaglio, P. Volpe, M. Speranza and R. Gabrielli, "Gas phase ion-molecule reactions of monogermane with oxygen and ammonia", J. Organomet. Chem. 354, 39 (1988). doi: 10.1016/0022-328X(88)80637-5
    • (1988) J. Organomet. Chem , vol.354 , pp. 39
    • Benzi, P.1    Operti, L.2    Vaglio, G.A.3    Volpe, P.4    Speranza, M.5    Gabrielli, R.6
  • 23
    • 0000276543 scopus 로고
    • Gas phase ion-molecule reactions of monogermane with carbon oxides and ethylene: Formation of germanium-carbon bonds
    • doi: 10.1016/0022-328X(89)85058-2
    • P. Benzi, L. Operti, G.A. Vaglio, P. Volpe, M. Speranza and R. Gabrielli, "Gas phase ion-molecule reactions of monogermane with carbon oxides and ethylene: formation of germanium-carbon bonds", J. Organomet. Chem. 373, 289 (1989). doi: 10.1016/0022-328X(89)85058-2
    • (1989) J. Organomet. Chem , vol.373 , pp. 289
    • Benzi, P.1    Operti, L.2    Vaglio, G.A.3    Volpe, P.4    Speranza, M.5    Gabrielli, R.6
  • 24
    • 0001395776 scopus 로고
    • Gas phase ion/molecule reactions in monogermane-hydrocarbon mixtures: A comparative Fourier transform mass spectrometry and chemical ionization mass spectrometry study
    • doi: 10.1016/0168-1176(90)85100-G
    • P. Benzi, L. Operti, G.A. Vaglio, P. Volpe, M. Speranza and R. Gabrielli, "Gas phase ion/molecule reactions in monogermane-hydrocarbon mixtures: a comparative Fourier transform mass spectrometry and chemical ionization mass spectrometry study", Int. J. Mass Spectrom. Ion Processes 100, 647 (1990). doi: 10.1016/0168-1176(90)85100-G
    • (1990) Int. J. Mass Spectrom. Ion Processes , vol.100 , pp. 647
    • Benzi, P.1    Operti, L.2    Vaglio, G.A.3    Volpe, P.4    Speranza, M.5    Gabrielli, R.6
  • 25
    • 4243320611 scopus 로고
    • Ion-molecule reactions in germane/silane systems studied by ion trap mass spectrometry
    • L. Operti, M. Splendore, G.A. Vaglio and P. Volpe, "Ion-molecule reactions in germane/silane systems studied by ion trap mass spectrometry", Spectrochim. Acta 49A, 1213 (1993).
    • (1993) Spectrochim. Acta , vol.49 A , pp. 1213
    • Operti, L.1    Splendore, M.2    Vaglio, G.A.3    Volpe, P.4
  • 26
    • 0346571070 scopus 로고
    • Gas phase ion-molecule reactions in mixtures of silicon and germanium hydrides by ion trap mass spectrometry
    • doi: 10.1021/om00035a042
    • L. Operti, M. Splendore, G.A. Vaglio and P. Volpe, "Gas phase ion-molecule reactions in mixtures of silicon and germanium hydrides by ion trap mass spectrometry", Organometallics 12, 4516 (1993). doi: 10.1021/om00035a042
    • (1993) Organometallics , vol.12 , pp. 4516
    • Operti, L.1    Splendore, M.2    Vaglio, G.A.3    Volpe, P.4
  • 27
    • 0002764659 scopus 로고    scopus 로고
    • Gas phase ion/molecule reactions in phosphine/germane mixtures studied by ion trapping
    • doi: 10.1016/0168-1176(95)04326-8
    • P. Benzi, L. Operti, R. Rabezzana, M. Splendore and P. Volpe, "Gas phase ion/molecule reactions in phosphine/germane mixtures studied by ion trapping", Int. J. Mass Spectrom. Ion Process. 152, 61 (1996). doi: 10.1016/0168-1176(95)04326-8
    • (1996) Int. J. Mass Spectrom. Ion Process , vol.152 , pp. 61
    • Benzi, P.1    Operti, L.2    Rabezzana, R.3    Splendore, M.4    Volpe, P.5
  • 28
    • 0002717218 scopus 로고    scopus 로고
    • Gas phase ion chemistry in germane/ammonia, methylgermane/ammonia, and methylgermane/phosphine
    • doi: 10.1016/S1387-3806(98)14236-7
    • P. Antoniotti, L. Operti, R. Rabezzana and G.A. Vaglio, "Gas phase ion chemistry in germane/ammonia, methylgermane/ammonia, and methylgermane/phosphine", Int. J. Mass Spectrom. 182/183, 63 (1999). doi: 10.1016/S1387-3806(98)14236-7
    • (1999) Int. J. Mass Spectrom , vol.182-183 , pp. 63
    • Antoniotti, P.1    Operti, L.2    Rabezzana, R.3    Vaglio, G.A.4
  • 29
    • 33947389956 scopus 로고    scopus 로고
    • 4/allene (X=Ge, Si) gaseous mixtures-formation of X-C bonds, Eur. J. Inorg. Chem. 2000, 505 (2000). doi: 10.1002/1099- 0682(200007)2000:7
    • 4/allene (X=Ge, Si) gaseous mixtures-formation of X-C bonds", Eur. J. Inorg. Chem. 2000, 505 (2000). doi: 10.1002/1099- 0682(200007)2000:7
  • 30
    • 0035809293 scopus 로고    scopus 로고
    • Experimental and theoretical study of the formation of germanium-carbon ion species in gaseous germane/ethene mix tures
    • doi: 10.1021/om0005553
    • P. Antoniotti, C. Canepa, A. Maranzana, L. Operti, R. Rabezzana, G. Tonachini and G.A. Vaglio, "Experimental and theoretical study of the formation of germanium-carbon ion species in gaseous germane/ethene mix tures", Organometallics 20, 382 (2001). doi: 10.1021/om0005553
    • (2001) Organometallics , vol.20 , pp. 382
    • Antoniotti, P.1    Canepa, C.2    Maranzana, A.3    Operti, L.4    Rabezzana, R.5    Tonachini, G.6    Vaglio, G.A.7
  • 31
    • 0036292993 scopus 로고    scopus 로고
    • Gasphase ion chemistry in germane-propane and germane-propene mixtures
    • doi: 10.1002/jms.319
    • P. Benzi, L. Operti, R. Rabezzana and G.A. Vaglio, "Gasphase ion chemistry in germane-propane and germane-propene mixtures", J. Mass Spectrom. 37, 603 (2002). doi: 10.1002/jms.319
    • (2002) J. Mass Spectrom , vol.37 , pp. 603
    • Benzi, P.1    Operti, L.2    Rabezzana, R.3    Vaglio, G.A.4
  • 37
    • 33749318959 scopus 로고    scopus 로고
    • Negative gasphase ion chemistry of silane: A quadrupole ion trap study
    • doi: 10.1002/rcm.2662
    • L. Operti, R. Rabezzana and G.A. Vaglio, "Negative gasphase ion chemistry of silane: a quadrupole ion trap study", Rapid Commun. Mass Spectrom. 20, 2696 (2006). doi: 10.1002/rcm.2662
    • (2006) Rapid Commun. Mass Spectrom , vol.20 , pp. 2696
    • Operti, L.1    Rabezzana, R.2    Vaglio, G.A.3
  • 38
    • 34247846176 scopus 로고    scopus 로고
    • Gasphase positive and negative ion/molecule reactions in diborane and silane/diborane mixtures
    • doi: 10.1016/j.ijms.2007.03.018
    • L. Operti, R. Rabezzana, F. Turco and G.A. Vaglio, "Gasphase positive and negative ion/molecule reactions in diborane and silane/diborane mixtures", Int. J. Mass Spectrom. 264, 61 (2007). doi: 10.1016/j.ijms.2007.03.018
    • (2007) Int. J. Mass Spectrom , vol.264 , pp. 61
    • Operti, L.1    Rabezzana, R.2    Turco, F.3    Vaglio, G.A.4
  • 39
    • 0002075136 scopus 로고
    • Ion-molecule reactions in monogermane
    • doi: 10.1021/j100620a006
    • J.K. Northrop and F.W. Lampe "Ion-molecule reactions in monogermane", J. Phys. Chem. 77, 30 (1973). doi: 10.1021/j100620a006
    • (1973) J. Phys. Chem , vol.77 , pp. 30
    • Northrop, J.K.1    Lampe, F.W.2
  • 40
  • 43
    • 26744477616 scopus 로고
    • +) radical cation. An ab initio study of its ground-state structure and kinetic stability
    • doi: 10.1016/0009-2614(88)87263-4
    • +) radical cation. An ab initio study of its ground-state structure and kinetic stability", Chem. Phys. Lett. 148, 73 (1988). doi: 10.1016/0009-2614(88)87263-4
    • (1988) Chem. Phys. Lett , vol.148 , pp. 73
    • Kudo, T.1    Nagase, S.2
  • 46
    • 33751158234 scopus 로고
    • + ions as revealed by post-Hartree-Fock calculations
    • doi: 10.1021/j100091a023
    • + ions as revealed by post-Hartree-Fock calculations", J. Phys. Chem. 98, 10084 (1994). doi: 10.1021/j100091a023
    • (1994) J. Phys. Chem , vol.98 , pp. 10084
    • Archibong, E.F.1    Leszczyński, J.2
  • 47
    • 84981626260 scopus 로고
    • 2, and their cations and anions from density functional computations
    • doi: 10.1002/qua.560560604
    • 2, and their cations and anions from density functional computations", Int. J. Quantum Chem. 56, 669 (1995). doi: 10.1002/qua.560560604
    • (1995) Int. J. Quantum Chem , vol.56 , pp. 669
    • Mineva, J.1    Russo, N.2    Sicilia, E.3    Toscano, M.4
  • 48
    • 0001074606 scopus 로고
    • Group 14 analogs of cyclopropenium ion: Do they favor classical aromatic structures?
    • doi: 10.1021/ja00150a043
    • E.D. Jemmis, G.N. Srinivas, J. Leszczyński, J. Kapp, A.A. Korkin and P.v.R. Schleyer, "Group 14 analogs of cyclopropenium ion: do they favor classical aromatic structures?", J. Am. Chem. Soc. 117, 11361 (1995). doi: 10.1021/ja00150a043
    • (1995) J. Am. Chem. Soc , vol.117 , pp. 11361
    • Jemmis, E.D.1    Srinivas, G.N.2    Leszczyński, J.3    Kapp, J.4    Korkin, A.A.5    Schleyer, P.V.R.6
  • 50
    • 0030470054 scopus 로고    scopus 로고
    • + is the most trivial carbocation, but are its heavier congeners just lookalikes?
    • doi: 10.1021/ja962275d
    • + is the most trivial carbocation, but are its heavier congeners just lookalikes?", J. Am. Chem. Soc. 118, 12154 (1996). doi: 10.1021/ja962275d
    • (1996) J. Am. Chem. Soc , vol.118 , pp. 12154
    • Kapp, J.1    Schreiner, P.R.2    Schleyer, P.V.R.3
  • 51
    • 0030134091 scopus 로고    scopus 로고
    • + cation
    • doi: 10.1021/jp953020
    • + cation", J. Phys. Chem. 100, 8250 (1996). doi: 10.1021/jp953020+
    • (1996) J. Phys. Chem , vol.100 , pp. 8250
    • So, S.P.1
  • 53
    • 0032563040 scopus 로고    scopus 로고
    • + isomers
    • doi: 10.1016/S0009-2614(98)00639-3
    • + isomers", Chem. Phys. Lett. 291, 523 (1998). doi: 10.1016/S0009-2614(98)00639-3
    • (1998) Chem. Phys. Lett , vol.291 , pp. 523
    • So, S.P.1
  • 54
    • 0001415906 scopus 로고    scopus 로고
    • + isomers
    • doi: 10.1016/S0009-2614(99)01089-1
    • + isomers", Chem. Phys. Lett. 313, 587 (1999). doi: 10.1016/S0009-2614(99)01089-1
    • (1999) Chem. Phys. Lett , vol.313 , pp. 587
    • So, S.P.1
  • 57
    • 41149134216 scopus 로고    scopus 로고
    • C. Pagura and S. Valcher, Institute for Energetics and Interphases of CNR, C.so Stati Uniti 4, 35127 Padova, Italy, GENANSPE - A software tool for spectra intepretation and de-convolution, Internal report 1998-2004. A copy of the program can be asked for by e-mail to c.pagura@ieni.cnr.it
    • C. Pagura and S. Valcher, Institute for Energetics and Interphases of CNR, C.so Stati Uniti 4, 35127 Padova, Italy, GENANSPE - A software tool for spectra intepretation and de-convolution, Internal report 1998-2004. A copy of the program can be asked for by e-mail to c.pagura@ieni.cnr.it
  • 58
    • 36749115629 scopus 로고
    • Parametrization of the ion-polar molecule collision rate constants by trajectory calculations
    • doi: 10.1063/1.442828
    • T. Su and W.J. Chesnavich, "Parametrization of the ion-polar molecule collision rate constants by trajectory calculations", J. Chem. Phys. 76, 5183 (1982). doi: 10.1063/1.442828
    • (1982) J. Chem. Phys , vol.76 , pp. 5183
    • Su, T.1    Chesnavich, W.J.2
  • 59
    • 10444246894 scopus 로고
    • Polarizabilities from δ-function potentials
    • doi: 10.1021/j100792a033
    • E.R. Lippincot and J.M. Stutman, "Polarizabilities from δ-function potentials", J. Phys. Chem. 68, 2926 (1964). doi: 10.1021/j100792a033
    • (1964) J. Phys. Chem , vol.68 , pp. 2926
    • Lippincot, E.R.1    Stutman, J.M.2
  • 60
    • 41149089124 scopus 로고    scopus 로고
    • Thermochemical data are taken
    • P.J. Linstrom and W.G. Mallard Eds, from, NIST Standard Reference Database Number 69, Gaithersburg, MD, USA, June
    • P.J. Linstrom and W.G. Mallard (Eds), Thermochemical data are taken from NIST Chemistry Webbook, NIST Standard Reference Database Number 69. National Institute of Standards and Technology, Gaithersburg, MD, USA, June 2005, http://webbook.nist.gov
    • (2005) NIST Chemistry Webbook
  • 61
    • 0006227618 scopus 로고
    • Ground states of molecules. 41. MNDO results for molecules containing boron
    • doi: 10.1021/ja00458a001
    • M.J.S. Dewar and M.L. McKee, "Ground states of molecules. 41. MNDO results for molecules containing boron", J. Am. Chem. Soc. 99, 5231 (1977). doi: 10.1021/ja00458a001
    • (1977) J. Am. Chem. Soc , vol.99 , pp. 5231
    • Dewar, M.J.S.1    McKee, M.L.2
  • 62
    • 0013330973 scopus 로고
    • The fragmentation of some boron hydrides by electron impact
    • doi: 10.1021/ja01058a010
    • T.P. Fehlner and W.S. Koski, "The fragmentation of some boron hydrides by electron impact", J. Am. Chem. Soc. 86, 581 (1964). doi: 10.1021/ja01058a010
    • (1964) J. Am. Chem. Soc , vol.86 , pp. 581
    • Fehlner, T.P.1    Koski, W.S.2
  • 63
    • 0012029595 scopus 로고    scopus 로고
    • Bonding nature and reaction behavior of inter-element linkages with transition metal complexes. A theoretical study
    • doi: 10.1016/S0022-328X(00)00456-3
    • S. Sakaki, B. Biswas, Y. Musashi and M. Sugimoto, "Bonding nature and reaction behavior of inter-element linkages with transition metal complexes. A theoretical study", J. Organomet. Chem. 611, 288 (2000). doi: 10.1016/S0022-328X(00)00456-3
    • (2000) J. Organomet. Chem , vol.611 , pp. 288
    • Sakaki, S.1    Biswas, B.2    Musashi, Y.3    Sugimoto, M.4
  • 64
    • 0037435132 scopus 로고    scopus 로고
    • 6: A theoretical study
    • doi: 10.1021/jp027113k
    • 6: a theoretical study", J. Phys. Chem. A 107, 1635 (2003). doi: 10.1021/jp027113k
    • (2003) J. Phys. Chem. A , vol.107 , pp. 1635
    • Hu, S.1    Wang, Y.2    Wang, X.-Y.3


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