SCOPUS 정보 검색 플랫폼

Volumn 504, Issue 1-2, 2006, Pages 95-100

A study of Si/SiGe selective epitaxial growth by experimental design approach

Author keywords

Chemical vapor deposition processes; Doping; Germanium silicon alloys

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GERMANIUM COMPOUNDS; OPTICAL DESIGN; SEMICONDUCTOR DOPING; SILICON COMPOUNDS; TEMPERATURE CONTROL; X RAY DIFFRACTION;

JMP STATISTICAL DISCOVERY SOFTWARE; PARETO PLOTS; REAL MANUFACTURING ENVIRONMENT; SELECTIVE EPITAXIAL GROWTH;

EPITAXIAL GROWTH;

EID: 33644931597 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.09.049 Document Type: Conference Paper

Times cited : (9)

References (12)

1
- 0036498730
- J.M. Hartmann, V. Loup, G. Rolland, P. Holliger, F. Laugier, C. Vannuffel, and M.N. Séméria J. Cryst. Growth 236 2002 10
- (2002) J. Cryst. Growth , vol.236 , pp. 10
- Hartmann, J.M.¹ Loup, V.² Rolland, G.³ Holliger, P.⁴ Laugier, F.⁵ Vannuffel, C.⁶ Séméria, M.N.⁷

2
- 0036566506
- J.M. Hartmann, F. Champay, V. Loup, G. Rolland, and M.N. Séméria J. Cryst. Growth 241 2002 93
- (2002) J. Cryst. Growth , vol.241 , pp. 93
- Hartmann, J.M.¹ Champay, F.² Loup, V.³ Rolland, G.⁴ Séméria, M.N.⁵

3
- 0042009849
- J.M. Hartmann, A. Abbadie, M. Vinet, L. Clavelier, P. Holliger, D. Lafond, M.N. Séméria, and P. Gentile J. Cryst. Growth 257 2003 19
- (2003) J. Cryst. Growth , vol.257 , pp. 19
- Hartmann, J.M.¹ Abbadie, A.² Vinet, M.³ Clavelier, L.⁴ Holliger, P.⁵ Lafond, D.⁶ Séméria, M.N.⁷ Gentile, P.⁸

4
- 0035503646
- C. Menon, A. Bentzen, and H.H. Radamson J. Appl. Phys. 90 2001 4805
- (2001) J. Appl. Phys. , vol.90 , pp. 4805
- Menon, C.¹ Bentzen, A.² Radamson, H.H.³

5
- 0037074787
- C. Fellous, F. Romagna, and D. Dutartre Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. 89 2002 323
- (2002) Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. , vol.89 , pp. 323
- Fellous, C.¹ Romagna, F.² Dutartre, D.³

6
- 0033285202
- W.B. De Boer, D. Terpstra, and J.G.M. Van Berkum Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. 67 1999 46
- (1999) Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. , vol.67 , pp. 46
- De Boer, W.B.¹ Terpstra, D.² Van Berkum, J.G.M.³

7
- 0037074872
- P. Ribot, S. Monfray, T. Skotnicki, and D. Dutartre Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. 89 2002 125
- (2002) Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. , vol.89 , pp. 125
- Ribot, P.¹ Monfray, S.² Skotnicki, T.³ Dutartre, D.⁴

8
- 0033689423
- S. Bozzo, J.-L. Lazzari, C. Coudreau, A. Ronda, F.A. d'Avitaya, J. Derrien, S. Mesters, B. Hollaender, P. Gergaud, and O. Thomas J. Cryst. Growth 216 2000 171
- (2000) J. Cryst. Growth , vol.216 , pp. 171
- Bozzo, S.¹ Lazzari, J.-L.² Coudreau, C.³ Ronda, A.⁴ D'Avitaya, F.A.⁵ Derrien, J.⁶ Mesters, S.⁷ Hollaender, B.⁸ Gergaud, P.⁹ Thomas, O.¹⁰

9
- 0000317778
- T.I. Kamins, D.W. Vook, P.K. Yu, and J.E. Turner Appl. Phys. Lett. 61 1992 669
- (1992) Appl. Phys. Lett. , vol.61 , pp. 669
- Kamins, T.I.¹ Vook, D.W.² Yu, P.K.³ Turner, J.E.⁴

10
- 36449002170
- T.I. Kamins, and D.J. Meyer Appl. Phys. Lett. 59 1991 178
- (1991) Appl. Phys. Lett. , vol.59 , pp. 178
- Kamins, T.I.¹ Meyer, D.J.²

11
- 0003687677
- John Wiley & Sons New York
- G.E.P. Box, W.G. Hunter, and J.S. Hunter Statistics for experimenters: an introduction to design, data analysis, and model building 1978 John Wiley & Sons New York 385
- (1978) Statistics for Experimenters: An Introduction to Design, Data Analysis, and Model Building , pp. 385
- Box, G.E.P.¹ Hunter, W.G.² Hunter, J.S.³

12
- 0006044456
- C.G. Cullen The Electrochemical Society Pennington, NJ
- S. Chang, D. Unzicker, and T.J. Anderson C.G. Cullen Proceedings of the 10th International Conference on CVD vol. 87-8 1987 The Electrochemical Society Pennington, NJ 122
- (1987) Proceedings of the 10th International Conference on CVD , vol.87 , Issue.8 , pp. 122
- Chang, S.¹ Unzicker, D.² Anderson, T.J.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.