메뉴 건너뛰기




Volumn 264, Issue 1, 2007, Pages 61-69

Gas-phase positive and negative ion/molecule reactions in diborane and silane/diborane mixtures

Author keywords

Diborane; Gas phase ion chemistry; Ion trap mass spectrometry; Negative ion; Silane

Indexed keywords


EID: 34247846176     PISSN: 13873806     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijms.2007.03.018     Document Type: Article
Times cited : (8)

References (44)
  • 2
    • 34247883249 scopus 로고    scopus 로고
    • S. Inoue, Manufacture of Semiconductor Integrated Circuits, JP 63307724 (1988).
  • 3
    • 34247856380 scopus 로고    scopus 로고
    • Toshiba Corp. Integrated Circuits. JP 59111324 (1984).
  • 38
    • 34247879219 scopus 로고    scopus 로고
    • C. Pagura, S. Valcher, Institute for Energetics and Interphases of CNR, C.so Stati Uniti, 4-35127 PADOVA - Italy - GENANSPE - a software tool for spectra intepretation and de-convolution - Internal Report 1998-2004. A copy of the program can be asked by e-mail to c.pagura@ieni.cnr.it.
  • 41
    • 34247878213 scopus 로고    scopus 로고
    • S.G. Lias, J.E. Bartmess, J.F. Liebman, J.L. Holmes, R.D. Levin, W.G. Mallard, J. Phys. Chem. Ref. Data 17 (Suppl. 1) (1988).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.