Mechanical and tribological properties of multi-element (AlCrTaTiZr)N coatings

Surface and Coatings Technology

Volumn 202, Issue 15, 2008, Pages 3732-3738

  Lai, Chia Han ^a   Cheng, Keng Hao ^a   Lin, Su Jien ^a   Yeh, Jien Wei ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Adhesion; Hardness; Multi element; Nitrides; Reactive sputtering; Wear

Indexed keywords

ADHESION; COMPRESSIVE STRESS; CRYSTAL MICROSTRUCTURE; FRICTION; HARDNESS; MAGNETRON SPUTTERING; NITRIDES; REACTIVE SPUTTERING; WEAR OF MATERIALS;

COMPRESSIVE MACROSTRESS; FRICTION COEFFICIENT; MULTI-ELEMENT COATING; REACTIVE RF MAGNETRON SPUTTERING;

INORGANIC COATINGS;

ADHESION; COMPRESSIVE STRESS; CRYSTAL MICROSTRUCTURE; FRICTION; HARDNESS; INORGANIC COATINGS; MAGNETRON SPUTTERING; NITRIDES; REACTIVE SPUTTERING; WEAR OF MATERIALS;

EID: 40949151547     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.01.014     Document Type: Article

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