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Scripta Materialia

Volumn 53, Issue 2, 2005, Pages 241-245

Age hardening of PACVD TiBN thin films

(3) Mayrhofer, P H a Stoiber, M b Mitterer, C a

a UNIVERSITY OF LEOBEN (Austria)

b MATERIALS CENTER LEOBEN FORSCHUNG GMBH (Austria)

Author keywords

Ab initio electron theory; Ageing; Decomposition; Thin films; TiBN

Indexed keywords

AGING OF MATERIALS; CARBON BLACK; CARBON NANOTUBES; CONDUCTIVE PLASTICS; CORROSION; DECOMPOSITION; PHYSICAL VAPOR DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SIGNAL INTERFERENCE; THERMAL CONDUCTIVITY; TITANIUM COMPOUNDS; ULTRAVIOLET RADIATION;

AB INITIO ELECTRON THEORY; ATOMIC ASSEMBLY KINETICS; HARD THIN FILMS; THERMAL EXPOSURE;

THIN FILMS;

EID: 18244394287 PISSN: 13596462 EISSN: None Source Type: Journal
DOI: 10.1016/j.scriptamat.2005.03.031 Document Type: Article

Times cited : (79)

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