Microstructure and surface roughness of microcrystalline silicon prepared by very high frequency-glow discharge using hydrogen dilution

Journal of Non-Crystalline Solids

Volumn 266-269 A, Issue , 2000, Pages 125-130

  Vallat Sauvain, E ^a   Kroll, U ^a   Meier, J ^a   Wyrsch, N ^a   Shah, A ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000479988     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0022-3093(99)00769-3     Document Type: Article

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