Estimation of amorphous silicon thin film density by optical methods

Vacuum

Volumn 80, Issue 1-3, 2005, Pages 146-150

  Gracin, D ^a   Juraic, K ^a   Bogdanovic Radovic, I ^a  

^a RUDER BO KOVI INSTITUTE   (Croatia)

Author keywords

Amorphous silicon; EMA; ERDA; FTIR; Voids

Indexed keywords

AMORPHOUS SILICON; APPROXIMATION THEORY; CHEMICAL BONDS; DENSITY (SPECIFIC GRAVITY); FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; MAGNETRON SPUTTERING;

EFFECTIVE MEDIUM APPROXIMATION (EMA); ERDA; FILM DENSITY; VOIDS;

THIN FILMS;

EID: 25444502310     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.08.016     Document Type: Conference Paper

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