Three-dimensionally combined carbonized polymer sensor and heater

Sensors and Actuators, A: Physical

Volumn 143, Issue 1, 2008, Pages 97-105

  Jeong, Ok Chan ^a   Konishi, Satoshi ^b  

^a Inje University   (South Korea)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Carbonization; Photo resist NO2 sensor; Sensitivity; Shrinkage; SU8 heater

Indexed keywords

CARBONIZATION; ELECTRIC RESISTANCE; GAS DETECTORS; NITROGEN COMPOUNDS; OPTIMIZATION; SHRINKAGE;

CARBONIZED POLYMER SENSOR; MICRORESISTIVE HEATER; STRUCTURAL FAILURE;

CHEMICAL SENSORS;

EID: 40949092009     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.08.014     Document Type: Article

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