Pyrolyzed polymer MESH electrode integrated into fluidic channel for gate type sensor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 271-274

  Yamamoto, Kensaku ^a   Naka, Keisuke ^a   Nagaura, Yasuhiro ^b   Sato, Hironobu ^b   Shoji, Shuichi ^b   Konishi, Satoshi ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b WASEDA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS; COMPOSITE MICROMECHANICS; CONDUCTIVE MATERIALS; ELECTROLYSIS; INSULATION; LITHOGRAPHY; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; METALLIZING; MICROELECTROMECHANICAL DEVICES; POLYMERS; PYROLYSIS; REACTIVE ION ETCHING; THREE DIMENSIONAL;

DUAL PROCESS; INSULATION STRUCTURES; INTERNATIONAL CONFERENCES; MESH ELECTRODES; MICRO-ELECTRO MECHANICAL SYSTEMS; MICROMACHINED; MULTI-ANGLE; POLYMER ELECTRODES; POLYMER MATERIALS; POLYMER STRUCTURES; THREE-DIMENSIONAL STRUCTURING;

PHOTORESISTS;

EID: 43649090888     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. S. Konishi, H. Nagae, T. Sagaw, K. Naka and K. yoshioka, "Semiconductibity of Pyrolyzed Polymer for MEMS Application", Transduces'05 Conference, 2005, pp. 271-4274
2. J. Kim, X. Song, K. Kinoshita, M. Madou and R. White, "Electrochemical Studies of Carbon Films from Pyrolyzed Photoresist", Journal of Electrochemical Society, Vol. 145, No. 7, pp. 2314-2319, 1998
3. C. Wang, L. Taherabadi, G. Jia, M. Madou, Y. Yeh and B. Dunn, "C-MEMS for the Manufacture of 3D Microbatteries", Electrochemical and Solid-State Letters, Vol. 7, No. 11, pp. 435-438, 2004
4. K. Naka and S. Konishi, "Micro and Nano Structures of Carbonized Polymer through Pyrolytic Transform from Polymer Structure", IEE Micro and Nano Letters, accepted
5. th International Conference on Micro Electro Mechanical Systems, 2007, accepted
6. th International Conference on Micro Electro Mechanical Systems, 2006, pp. 518-521
7. R. Yokokawa, K. Yamamoto, S. Aoki, K. Naka and S. Konishi, "Characterization of Patterned Pyrolyzed Polymer for glucose sensor", Asia-Pacific Conference of Transducers and Micro-Nano Technology, 2006, pp. 287-290
8. H. Sato, T. Kakinuma, J. S. Go and S. Shoji "In-channel 3-D Micromesh Structures using Maskless Multi-Angle Exposure and their Microfilter Application", Sensors and Actuators A, Vol. 111, pp. 87-92, 2004