Pyrolyzed polymer as absorbent of nitrogen dioxide sensor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 518-521

  Naka, Keisuke ^a   Hashishin, Takeshi ^b   Tamaki, Jun ^a   Konishi, Satoshi ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NITROGEN COMPOUNDS; PYROLYSIS; THERMAL EFFECTS;

ABSORBENT; NITROGEN DIOXIDE SENSORS; PYROLYZED POLYMERS;

ORGANIC POLYMERS;

EID: 33750132364     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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