3 Dimensionally combined pyrolyzed polymer sensor and heater toward all polymeric gas detection system

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 111-114

  Jeong, Ok Chan ^a   Konishi, Satoshi ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; GAS DETECTORS; GASES; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NITROGEN; NITROGEN OXIDES; NONMETALS; OPTICAL DESIGN; PHOTORESISTS; REACTIVE ION ETCHING; SENSORS; SIGNAL DETECTION; VALVES (MECHANICAL);

BRIDGE-TYPE; CARBON STRUCTURES; GAS DETECTION; GAS SENSORS; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; NITROGEN DIOXIDE; PNEUMATIC VALVES; RESIST STRUCTURES;

GAS ABSORPTION;

EID: 40949104692     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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