Local heating of pyrolyzed polymer heaters for further carbonization at higher temperature

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 278-281

  Naka, Keisuke ^a   Konishi, Satoshi ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBONIZATION; CONDUCTIVE PLASTICS; POLYMERS; PYROLYSIS; THERMAL EFFECTS;

GLASSY CARBON; POLYMER HEATERS; PYROLYZED POLYMERS;

MICROELECTROMECHANICAL DEVICES;

EID: 33750093764     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. M. Murakami, K. Watanabe and S. Yoshimura, "High-quality pyrographite films", Appl. Phys. Lett., Vol. 48, pp. 1594-1596, 1986.
2. Y. Hishiyama, M. Nakamura, Y. Nagata and M. Inagaki, "Graphitization behavior of carbon film prepared from high modulus polyimide film: Synthesis of high-quality graphite film", Carbon, Vol. 32, pp. 645-650, 1994.
3. Y. Isono, A. Yoshida, Y. Hishiyama, Y. Kaburagi, "Carbonization and graphitization of shavings filed away from Kapton", Carbon, Vol. 42, pp. 1799-1805, 2004.
4. S. Konishi, M. Liger, T. A. Harder and Y-C. Tai, "Parylene-Pyrolyzed Carbon for MEMS Applications", in Digest Tech. Papers MEMS'04 Conference, Maastricht, January 25-29, 2004, pp. 161-164.
5. S. Konishi, H. Nagae, T. Sagawa, K. Naka and K. Yoshioka, "Semiconductivity of Pyrolyzed Polymer for MEMS Application", in Digest Tech. Papers Transduces'05 Conference, Seoul, June 5-9, 2005, pp. 271-274.
6. K. Naka and S Konishi, "Design and Fabrication of Pyrolyzed Polymer Micro and Nano Structures", in Digest Tech. Papers MHS'05 Symposium, Nagoya, November 7-9, 2005, to be presented.
7. M. Liger, S. Konishi and Y-C. Tai, "Uncooled All-Parylene Bolometer", in Digest Tech. Papers MEMS'04 Conference, Maastricht, January 25-29, 2004, pp. 593-596.
8. C. Wang, G. Jia, L. H. Taherabadi and M. J. Madou, "A Novel Method for the Fabrication of High-Aspect Ratio C-MEMS structures", J. Microelectromech. Syst., Vol.14, pp. 348-358, 2005.
9. K. Naka, H. Nagae, M. Ichiyanagi, O.C. Jeong and S. Konishi, "Investigation of Pyrolyzed Polyimide Thin Film as MEMS Material", JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, Vol. 5, pp. 38-43, 2005.
10. R. Kostecki, B. Schnyder, D. Alliata, X. Song, K. Kinoshita and R. Kotz, "Surface studies of carbon films from pyrolyzed photoresist", Thin Solid Films, Vol.396, pp36-43, 2001.
11. K. Ray, III and R. L. McCreery, "Spatially Resolved Raman Spectroscopy of Carbon Electrode Surfaces: Observations of Structural and Chemical Heterogeneity", Anal. Chem., Vol. 69, pp. 4680-4687, 1997.