Model parameter estimation and feedback control of surface roughness in a sputtering process

Chemical Engineering Science

Volumn 63, Issue 7, 2008, Pages 1800-1816

  Hu, Gangshi ^a   Lou, Yiming ^b   Christofides, Panagiotis D ^a,c  

^a Engineering IV   (United States)

^b Advanced Projects Research Inc   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Feedback control; Model reduction; Multiscale systems; Sputtering processes

Indexed keywords

FEEDBACK CONTROL; MONTE CARLO METHODS; NUMERICAL METHODS; PARAMETER ESTIMATION; SPUTTERING;

MODEL REDUCTION; MULTISCALE SYSTEMS; SPUTTERING PROCESSES;

SURFACE ROUGHNESS;

FEEDBACK CONTROL; MONTE CARLO METHODS; NUMERICAL METHODS; PARAMETER ESTIMATION; SPUTTERING; SURFACE ROUGHNESS;

EID: 40849118039     PISSN: 00092509     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ces.2007.12.008     Document Type: Article

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