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Volumn 30, Issue 10-12, 2006, Pages 1670-1686

Control and optimization of multiscale process systems

Author keywords

Feedback control; Kinetic Monte Carlo simulation; Multiscale process systems; Stochastic partial differential equation (sPDE); Thin film growth

Indexed keywords

FEEDBACK CONTROL; FILM GROWTH; MATHEMATICAL MODELS; MONTE CARLO METHODS; OPTIMIZATION; PROCESS CONTROL; THIN FILMS;

EID: 33747884777     PISSN: 00981354     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.compchemeng.2006.05.025     Document Type: Article
Times cited : (46)

References (54)
  • 1
    • 15944388626 scopus 로고    scopus 로고
    • Output feedback control of dissipative distributed processes via microscopic simulations
    • Armaou A. Output feedback control of dissipative distributed processes via microscopic simulations. Computers and Chemical Engineering 29 (2005) 771-782
    • (2005) Computers and Chemical Engineering , vol.29 , pp. 771-782
    • Armaou, A.1
  • 2
    • 0033167354 scopus 로고    scopus 로고
    • Plasma-enhanced chemical vapor deposition: Modeling and control
    • Armaou A., and Christofides P.D. Plasma-enhanced chemical vapor deposition: Modeling and control. Chemical Engineering Science 54 (1999) 3305-3314
    • (1999) Chemical Engineering Science , vol.54 , pp. 3305-3314
    • Armaou, A.1    Christofides, P.D.2
  • 3
    • 0034616305 scopus 로고    scopus 로고
    • Wave suppression by nonlinear finite-dimensional control
    • Armaou A., and Christofides P.D. Wave suppression by nonlinear finite-dimensional control. Chemical Engineering Science 55 (2000) 2627-2640
    • (2000) Chemical Engineering Science , vol.55 , pp. 2627-2640
    • Armaou, A.1    Christofides, P.D.2
  • 4
    • 0036899040 scopus 로고    scopus 로고
    • Dynamic optimization of dissipative PDE systems using nonlinear order reduction
    • Armaou A., and Christofides P.D. Dynamic optimization of dissipative PDE systems using nonlinear order reduction. Chemical Engineering Science 57 (2002) 5083-5114
    • (2002) Chemical Engineering Science , vol.57 , pp. 5083-5114
    • Armaou, A.1    Christofides, P.D.2
  • 5
    • 15944420251 scopus 로고    scopus 로고
    • Equation-free controller designs for distributed complex/multiscale processes based on the gaptooth discretization scheme
    • Armaou A., Kevrekidis I.G., and Theodoropoulos C. Equation-free controller designs for distributed complex/multiscale processes based on the gaptooth discretization scheme. Computers and Chemical Engineering 29 (2005) 731-740
    • (2005) Computers and Chemical Engineering , vol.29 , pp. 731-740
    • Armaou, A.1    Kevrekidis, I.G.2    Theodoropoulos, C.3
  • 7
    • 0034388593 scopus 로고    scopus 로고
    • Nonlinear control of incompressible fluid flow: Application to Burgers' equation and 2D channel flow
    • Baker J., Armaou A., and Christofides P.D. Nonlinear control of incompressible fluid flow: Application to Burgers' equation and 2D channel flow. Journal of Mathematical Analysis and Applications 252 (2000) 230-255
    • (2000) Journal of Mathematical Analysis and Applications , vol.252 , pp. 230-255
    • Baker, J.1    Armaou, A.2    Christofides, P.D.3
  • 8
    • 0034689117 scopus 로고    scopus 로고
    • Finite dimensional approximation and control of nonlinear parabolic PDE systems
    • Baker J., and Christofides P.D. Finite dimensional approximation and control of nonlinear parabolic PDE systems. International Journal of Control 73 (2000) 439-456
    • (2000) International Journal of Control , vol.73 , pp. 439-456
    • Baker, J.1    Christofides, P.D.2
  • 9
    • 0033856262 scopus 로고    scopus 로고
    • Optimization of transport-reaction processes using nonlinear model reduction
    • Bendersky E., and Christofides P.D. Optimization of transport-reaction processes using nonlinear model reduction. Chemical Engineering Science 55 (2000) 4349-4366
    • (2000) Chemical Engineering Science , vol.55 , pp. 4349-4366
    • Bendersky, E.1    Christofides, P.D.2
  • 12
    • 0037104857 scopus 로고    scopus 로고
    • Control of distributed parameter systems [Special issue]
    • Christofides P.D. Control of distributed parameter systems [Special issue]. Computers and Chemical Engineering 26 7/8 (2002) 939-940
    • (2002) Computers and Chemical Engineering , vol.26 , Issue.7-8 , pp. 939-940
    • Christofides, P.D.1
  • 13
    • 15944397650 scopus 로고    scopus 로고
    • Control of multiscale and distributed process systems [Special issue]
    • Christofides P.D., and Armaou A. Control of multiscale and distributed process systems [Special issue]. Computers and Chemical Engineering 29 4 (2005) 687-688
    • (2005) Computers and Chemical Engineering , vol.29 , Issue.4 , pp. 687-688
    • Christofides, P.D.1    Armaou, A.2
  • 14
    • 0031366767 scopus 로고    scopus 로고
    • Finite-dimensional control of parabolic PDE systems using approximate inertial manifolds
    • Christofides P.D., and Daoutidis P. Finite-dimensional control of parabolic PDE systems using approximate inertial manifolds. Journal of Mathematical Analysis and Applications 216 (1997) 398-420
    • (1997) Journal of Mathematical Analysis and Applications , vol.216 , pp. 398-420
    • Christofides, P.D.1    Daoutidis, P.2
  • 15
    • 1042302790 scopus 로고    scopus 로고
    • Coupled mesoscale-continuum simulations of copper electrodeposition in a trench
    • Drew T.O., Webb E.G., Ma D.L., Alameda J., Braatz R.D., and Alkire R.C. Coupled mesoscale-continuum simulations of copper electrodeposition in a trench. AIChE Journal 50 (2004) 226-240
    • (2004) AIChE Journal , vol.50 , pp. 226-240
    • Drew, T.O.1    Webb, E.G.2    Ma, D.L.3    Alameda, J.4    Braatz, R.D.5    Alkire, R.C.6
  • 18
    • 36448998595 scopus 로고
    • Theoretical foundations of dynamical Monte Carlo simulations
    • Fichthorn K.A., and Weinberg W.H. Theoretical foundations of dynamical Monte Carlo simulations. Journal of Chemical Physics 95 (1991) 1090-1096
    • (1991) Journal of Chemical Physics , vol.95 , pp. 1090-1096
    • Fichthorn, K.A.1    Weinberg, W.H.2
  • 19
    • 0027549695 scopus 로고
    • Single wafer processing in stagnation point flow CVD reactor: Prospects, constraints and reactor design
    • Gadgil P.N. Single wafer processing in stagnation point flow CVD reactor: Prospects, constraints and reactor design. Journal of Electronic Materials 22 (1993) 171-177
    • (1993) Journal of Electronic Materials , vol.22 , pp. 171-177
    • Gadgil, P.N.1
  • 20
    • 42749103186 scopus 로고    scopus 로고
    • Effective transition rates for epitaxial growth using fast modulation
    • Gallivan M.A., Goodwin D.G., and Murray R.M. Effective transition rates for epitaxial growth using fast modulation. Physical Review B 70 4 (2004) 045409
    • (2004) Physical Review B , vol.70 , Issue.4 , pp. 045409
    • Gallivan, M.A.1    Goodwin, D.G.2    Murray, R.M.3
  • 21
    • 0346685924 scopus 로고    scopus 로고
    • Reduction and identification methods for Markovian control systems, with application to thin film deposition
    • Gallivan M.A., and Murray R.M. Reduction and identification methods for Markovian control systems, with application to thin film deposition. International Journal of Robust and Nonlinear Control 14 (2004) 113-132
    • (2004) International Journal of Robust and Nonlinear Control , vol.14 , pp. 113-132
    • Gallivan, M.A.1    Murray, R.M.2
  • 22
    • 0017030517 scopus 로고
    • A general method for numerically simulating the stochastic time evolution of coupled chemical reactions
    • Gillespie D.T. A general method for numerically simulating the stochastic time evolution of coupled chemical reactions. Journal of Computational Physics 22 (1976) 403-434
    • (1976) Journal of Computational Physics , vol.22 , pp. 403-434
    • Gillespie, D.T.1
  • 23
    • 44049109914 scopus 로고
    • A rigorous derivation of the chemical master equation
    • Gillespie D.T. A rigorous derivation of the chemical master equation. Physica A 188 (1992) 404-425
    • (1992) Physica A , vol.188 , pp. 404-425
    • Gillespie, D.T.1
  • 24
    • 0015326437 scopus 로고
    • Simulation of crystal growth with surface diffusion
    • Gilmer G.H., and Bennema P. Simulation of crystal growth with surface diffusion. Journal of Applied Physics 43 (1972) 1347-1360
    • (1972) Journal of Applied Physics , vol.43 , pp. 1347-1360
    • Gilmer, G.H.1    Bennema, P.2
  • 25
    • 0034895077 scopus 로고    scopus 로고
    • Multiscale model for epitaxial growth of films: Growth mode transition
    • Lam R., and Vlachos D.G. Multiscale model for epitaxial growth of films: Growth mode transition. Physical Review B 64 (2001) 035401
    • (2001) Physical Review B , vol.64 , pp. 035401
    • Lam, R.1    Vlachos, D.G.2
  • 26
    • 0001149866 scopus 로고    scopus 로고
    • Noisy Kuramote-Sivashinsky equation for an erosion model
    • Lauritsen K.B., Cuerno R., and Makse H.A. Noisy Kuramote-Sivashinsky equation for an erosion model. Physical Review E 54 (2003) 3577-3580
    • (2003) Physical Review E , vol.54 , pp. 3577-3580
    • Lauritsen, K.B.1    Cuerno, R.2    Makse, H.A.3
  • 27
    • 0037962061 scopus 로고    scopus 로고
    • Estimation and control of surface roughness in thin film growth using kinetic Monte-Carlo models
    • Lou Y., and Christofides P.D. Estimation and control of surface roughness in thin film growth using kinetic Monte-Carlo models. Chemical Engineering Science 58 (2003) 3115-3129
    • (2003) Chemical Engineering Science , vol.58 , pp. 3115-3129
    • Lou, Y.1    Christofides, P.D.2
  • 28
    • 0038068807 scopus 로고    scopus 로고
    • Feedback control of growth rate and surface roughness in thin film growth
    • Lou Y., and Christofides P.D. Feedback control of growth rate and surface roughness in thin film growth. AIChE Journal 49 (2003) 2099-2113
    • (2003) AIChE Journal , vol.49 , pp. 2099-2113
    • Lou, Y.1    Christofides, P.D.2
  • 29
    • 8744309471 scopus 로고    scopus 로고
    • Feedback control of surface roughness of GaAs (0 0 1) thin films using kinetic Monte-Carlo models
    • Lou Y., and Christofides P.D. Feedback control of surface roughness of GaAs (0 0 1) thin films using kinetic Monte-Carlo models. Computers and Chemical Engineering 29 (2004) 225-241
    • (2004) Computers and Chemical Engineering , vol.29 , pp. 225-241
    • Lou, Y.1    Christofides, P.D.2
  • 30
    • 13444304351 scopus 로고    scopus 로고
    • Feedback control of surface roughness in sputtering processes using the stochastic Kuramoto-Sivashinsky equation
    • Lou Y., and Christofides P.D. Feedback control of surface roughness in sputtering processes using the stochastic Kuramoto-Sivashinsky equation. Computers and Chemical Engineering 29 (2005) 741-759
    • (2005) Computers and Chemical Engineering , vol.29 , pp. 741-759
    • Lou, Y.1    Christofides, P.D.2
  • 31
    • 12244249188 scopus 로고    scopus 로고
    • Feedback control of surface roughness using stochastic PDEs
    • Lou Y., and Christofides P.D. Feedback control of surface roughness using stochastic PDEs. AIChE Journal 51 (2005) 345-352
    • (2005) AIChE Journal , vol.51 , pp. 345-352
    • Lou, Y.1    Christofides, P.D.2
  • 35
    • 23944453411 scopus 로고    scopus 로고
    • Construction of stochastic PDEs for feedback control of surface roughness in thin film growth
    • Portland, OR
    • Ni D., and Christofides P.D. Construction of stochastic PDEs for feedback control of surface roughness in thin film growth. Proceedings of the American control conference. Portland, OR (2005) 2540-2547
    • (2005) Proceedings of the American control conference , pp. 2540-2547
    • Ni, D.1    Christofides, P.D.2
  • 36
    • 13444263244 scopus 로고    scopus 로고
    • Dynamics and control of thin film surface microstructure in a complex deposition process
    • Ni D., and Christofides P.D. Dynamics and control of thin film surface microstructure in a complex deposition process. Chemical Engineering Science 60 (2005) 1603-1617
    • (2005) Chemical Engineering Science , vol.60 , pp. 1603-1617
    • Ni, D.1    Christofides, P.D.2
  • 37
    • 13444249983 scopus 로고    scopus 로고
    • Multivariable predictive control of thin film deposition using a stochastic PDE model
    • Ni D., and Christofides P.D. Multivariable predictive control of thin film deposition using a stochastic PDE model. Industrial and Engineering Chemistry Research 44 (2005) 2416-2427
    • (2005) Industrial and Engineering Chemistry Research , vol.44 , pp. 2416-2427
    • Ni, D.1    Christofides, P.D.2
  • 38
    • 84890148921 scopus 로고    scopus 로고
    • Construction of stochastic PDEs and predictive control of surface roughness in thin film deposition
    • Springer-Verlag, Berlin pp. 343-367
    • Ni D., and Christofides P.D. Construction of stochastic PDEs and predictive control of surface roughness in thin film deposition. Model reduction and coarse-graining approaches for multiscale phenomena (2006), Springer-Verlag, Berlin pp. 343-367
    • (2006) Model reduction and coarse-graining approaches for multiscale phenomena
    • Ni, D.1    Christofides, P.D.2
  • 40
    • 41349107157 scopus 로고    scopus 로고
    • Derivation of continuum stochastic equations for discrete growth models
    • Park S., Kim D., and Park J. Derivation of continuum stochastic equations for discrete growth models. Physical Review E 65 (2002) 015102R
    • (2002) Physical Review E , vol.65
    • Park, S.1    Kim, D.2    Park, J.3
  • 41
    • 0141900705 scopus 로고    scopus 로고
    • Computationally efficient implementation of combustion chemistry using in situ adaptive tabulation
    • Pope S.B. Computationally efficient implementation of combustion chemistry using in situ adaptive tabulation. Combustion Theory Modelling 1 (1997) 41-63
    • (1997) Combustion Theory Modelling , vol.1 , pp. 41-63
    • Pope, S.B.1
  • 42
    • 0000291789 scopus 로고    scopus 로고
    • Low-dimensional approximations of multiscale epitaxial growth models for microstructure control of materials
    • Raimondeau S., and Vlachos D.G. Low-dimensional approximations of multiscale epitaxial growth models for microstructure control of materials. Journal of Computational Physics 160 (2000) 564-576
    • (2000) Journal of Computational Physics , vol.160 , pp. 564-576
    • Raimondeau, S.1    Vlachos, D.G.2
  • 43
    • 0035841075 scopus 로고    scopus 로고
    • Monte Carlo algorithms for complex surface reaction mechanisms: Efficiency and accuracy
    • Reese J.S., Raimondeau S., and Vlachos D.G. Monte Carlo algorithms for complex surface reaction mechanisms: Efficiency and accuracy. Journal of Computational Physics 173 (2001) 302-321
    • (2001) Journal of Computational Physics , vol.173 , pp. 302-321
    • Reese, J.S.1    Raimondeau, S.2    Vlachos, D.G.3
  • 44
    • 23944524429 scopus 로고    scopus 로고
    • Robust nonlinear feedback-feedforward control of a coupled kinetic Monte-Carlo-finite difference simulation
    • Portland, OR
    • Rusli E., Drews T.O., Ma D.L., Alkire R.C., and Braatz R.D. Robust nonlinear feedback-feedforward control of a coupled kinetic Monte-Carlo-finite difference simulation. Proceedings of the American control conference. Portland, OR (2005) 2548-2553
    • (2005) Proceedings of the American control conference , pp. 2548-2553
    • Rusli, E.1    Drews, T.O.2    Ma, D.L.3    Alkire, R.C.4    Braatz, R.D.5
  • 45
    • 0038824886 scopus 로고    scopus 로고
    • Microscopic/stochastic timesteppers and "coarse" control: A KMC example
    • Siettos C.I., Armaou A., Makeev A.G., and Kevrekidis I.G. Microscopic/stochastic timesteppers and "coarse" control: A KMC example. AIChE Journal 49 (2003) 1922-1926
    • (2003) AIChE Journal , vol.49 , pp. 1922-1926
    • Siettos, C.I.1    Armaou, A.2    Makeev, A.G.3    Kevrekidis, I.G.4
  • 48
    • 27144471786 scopus 로고    scopus 로고
    • Multiscale optimization using hybrid PDE/kMC process systems with application to thin film growth
    • Varshney A., and Armaou A. Multiscale optimization using hybrid PDE/kMC process systems with application to thin film growth. Chemical Engineering Science 60 (2005) 6780-6794
    • (2005) Chemical Engineering Science , vol.60 , pp. 6780-6794
    • Varshney, A.1    Armaou, A.2
  • 49
    • 23944453995 scopus 로고    scopus 로고
    • Optimization of thin film growth using multiscale process systems
    • Portland, OR
    • Varshney A., and Armaou A. Optimization of thin film growth using multiscale process systems. Proceedings of the American control conference. Portland, OR (2005) 2559-2565
    • (2005) Proceedings of the American control conference , pp. 2559-2565
    • Varshney, A.1    Armaou, A.2
  • 50
    • 33645685458 scopus 로고    scopus 로고
    • Optimal operation of GaN thin-film epitaxy employing control vector parametrization
    • Varshney A., and Armaou A. Optimal operation of GaN thin-film epitaxy employing control vector parametrization. AIChE Journal 52 (2006) 1378-1391
    • (2006) AIChE Journal , vol.52 , pp. 1378-1391
    • Varshney, A.1    Armaou, A.2
  • 51
    • 0031275154 scopus 로고    scopus 로고
    • Multiscale integration hybrid algorithms for homogeneous-heterogeneous reactors
    • Vlachos D.G. Multiscale integration hybrid algorithms for homogeneous-heterogeneous reactors. AIChE Journal 43 (1997) 3031-3041
    • (1997) AIChE Journal , vol.43 , pp. 3031-3041
    • Vlachos, D.G.1
  • 52
    • 4143138757 scopus 로고    scopus 로고
    • Edwards-Wilkinson equation from lattice transition rules
    • Vvedensky D.D. Edwards-Wilkinson equation from lattice transition rules. Physical Review E 67 (2003) 025102R
    • (2003) Physical Review E , vol.67
    • Vvedensky, D.D.1
  • 54
    • 23944495150 scopus 로고    scopus 로고
    • Complexity reduction of a thin film deposition model using a trajectory based nonlinear model reduction technique
    • Portland, OR
    • Wolfrum P., Vargas A., Gallivan M., and Allgower F. Complexity reduction of a thin film deposition model using a trajectory based nonlinear model reduction technique. Proceedings of the American control conference. Portland, OR (2005) 2566-2571
    • (2005) Proceedings of the American control conference , pp. 2566-2571
    • Wolfrum, P.1    Vargas, A.2    Gallivan, M.3    Allgower, F.4


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