Dynamics and control of thin film surface microstructure in a complex deposition process

Chemical Engineering Science

Volumn 60, Issue 6, 2005, Pages 1603-1617

  Ni, Pong ^a   Christofides, Panagiotis D ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Complex dynamics; Feedback control; Kinetic Monte Carlo simulation; Long range interaction; Model predictive control; Short range interaction; Thin film deposition

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEPOSITION; DIELECTRIC MATERIALS; MICROSTRUCTURE; SUBSTRATES; SURFACE ROUGHNESS;

CLOSED-LOOP SIMULATIONS; DEPOSITION PROCESS; GAS PHASE COMPOSITION; THIN FILM SURFACE MICROSTRUCTURE;

THIN FILMS;

SURFACE ROUGHNESS;

EID: 13444263244     PISSN: 00092509     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ces.2004.11.005     Document Type: Article

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