Feedback control of growth rate and surface roughness in thin film growth

AIChE Journal

Volumn 49, Issue 8, 2003, Pages 2099-2113

  Lou, Yiming ^a   Christofides, Panagiotis D ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FEEDBACK CONTROL; MATHEMATICAL MODELS; MICROSTRUCTURE; MONTE CARLO METHODS; MULTIVARIABLE CONTROL SYSTEMS; SURFACE ROUGHNESS;

GAS PHASE;

THIN FILMS;

FILM THICKNESS; MONTE CARLO SIMULATION; SURFACE ROUGHNESS;

ADSORPTION; ARTICLE; ATOM; CALCULATION; DESORPTION; FEEDBACK SYSTEM; FILM; FLOW; GAS; GEOMETRY; GROWTH RATE; KINETICS; MONTE CARLO METHOD; RATING SCALE; STOCHASTIC MODEL; SURFACE PROPERTY; TEMPERATURE; TIME;

EID: 0038068807     PISSN: 00011541     EISSN: None     Source Type: Journal    
DOI: 10.1002/aic.690490818     Document Type: Article

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