Vertically-shaped tunable MEMS resonators

Journal of Microelectromechanical Systems

Volumn 17, Issue 1, 2008, Pages 85-92

  Morgan, Brian ^a   Ghodssi, Reza ^b  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

Comb drive actuators; Electrostatic devices; Gray scale technology; Microelectromechanical devices; Microresonators; Resonators; Tuning

Indexed keywords

DRY ETCHING; ELECTROSTATIC DEVICES; FINITE ELEMENT METHOD; LITHOGRAPHY; NATURAL FREQUENCIES; RESONATORS;

COMB-DRIVEN ACTUATORS; GRAY-SCALE TECHNOLOGY; MICRORESONATORS;

MEMS;

EID: 40449128324     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.910251     Document Type: Article

References (20)

1. R. I. Pratt, G. C. Johnson, R. T. Howe, and J. C. Chang, "Micromechanical structures for thin film characterization," in Proc. Int. Conf. TRANSDUCERS, 1991, pp. 205-208.
2. L. Lin, R. T. Howe, and A. P. Pisano, "Microelectromechanical filters for signal processing," J. Microelectromech. Syst., vol. 7, no. 3, pp. 286-294, Sep. 1998.
3. J. Kim, S. Park, D. Kwak, H. Ko, W. Carr, J. Buss, and D. D. Cho, "Robust SOI process without footing for ultra high-performance microgyroscopes," in Proc. IEEE Int. Solid-State Sens., Actuators Conf., 2003, vol. 2, pp. 1691-1694.
4. P. S. Riehl, K. L. Scott, R. S. Muller, R. T. Howe, and J. A. Yasaitis, "Electrostatic charge and field sensors based on micromechanical resonators," J. Microelectromech. Syst., vol. 12, no. 5, pp. 577-589, Oct. 2003.
5. M. W. Pruessner, W. H. Chuang, K. Amarnath, S. Kanakaraju, and R. Ghodssi, "Micromechanical resonators with integrated optical waveguides for sensing applications," in Proc. CLEO, 2005, vol. 1, pp. 761-763. (IEEE Cat. No. 05TH8796).
6. C. B. Williams and R. B. Yates, "Analysis of a micro-electric generator for microsystems," in Proc. 8th Int. Conf. Solid-State Sens., Actuators Eurosensors IX. Dig. Tech. Papers, 1995, vol. 1, pp. 369-372. (IEEE Cat. No. 95TH8173).
7. S. Meninger, J. O. Mur-Miranda, R. Amirtharajah, A. Chandrakasan, and J. H. Lang, "Vibration-to-electric energy conversion," IEEE Trans. Very Large Scale Integr. (VLSI) Syst., vol. 9, no. 1, pp. 64-76, Feb. 2001.
8. S. Roundy, B. P. Otis, Y.-H. Chee, J. M. Rabaey, and P. K. Wright, "A 1.9 GHz RF transmit beacon using environmentally scavenged energy," presented at the ISPLED, Seoul, Korea, Aug. 25-27, 2003.
9. G. Piazza, R. Abdolvand, G. K. Ho, and F. Ayazi, "Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators," Sens. Actuators A, Phys., vol. 111, no. 1, pp. 71-78, Mar. 2004.
10. J. J. Yao and N. C. MacDonald, "A micromachined, single-crystal silicon, tunable resonator," J. Micromech. Microeng., vol. 5, no. 3, pp. 257-264, Sep. 1995.
11. X. Zhang and W. C. Tang, "Viscous air damping in laterally driven microresonators," in Proc. IEEE MEMS, 1994, pp. 199-204.
12. B. E. DeMartini, J. F. Rhoads, K. L. Turner, S. W. Shaw, and J. Moehlis, "Linear and nonlinear tuning of parametrically excited MEMS oscillators," J. Microelectromech. Syst., vol. 16, no. 2, pp. 310-318, Apr. 2007.
13. S. G. Adams, F. M. Bertsch, K. A. Shaw, P. G. Hartwell, F. C. Moon, and N. C. MacDonald, "Capacitance based tunable resonators," J. Micromech. Microeng., vol. 8, no. 1, pp. 15-23, Mar. 1998.
14. B. D. Jensen, S. Mutlu, S. Miller, K. Kurabayashi, and J. J. Allen, "Shaped comb fingers for tailored electromechanical restoring force," J. Microelectromech. Syst., vol. 12, no. 3, pp. 373-383, Jun. 2003.
15. B. Morgan and R. Ghodssi, "Compact tunable resonators using vertically-shaped comb-fingers towards vibration energy scavenging," in Proc. Power MEMS, Berkeley, CA, Nov. 29-Dec. 1 2006, pp. 177-180.
16. W. Ye and S. Mukherjee, "Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives," Int. J. Numer. Methods Eng., vol. 45, no. 2, pp. 175-194, 1999.
17. B. Morgan, C. M. Waits, J. Krizmanic, and R. Ghodssi, "Development of a deep silicon phase Fresnel lens using gray-scale lithography and deep reactive ion etching," J. Microelectromech. Syst., vol. 13, no. 1, pp. 113-120, Feb. 2004.
18. B. Morgan, J. McGee, and R. Ghodssi, "Automated two-axes optical fiber alignment using gray-scale technology," J. Microelectromech. Syst. vol. 16, no. 1, pp. 102-110, Feb. 2007.
19. S. D. Senturia, Microsystems Design. Norwell, MA: Kluwer, 2000, p. 252.
20. K. Lee and Y.-H. Cho, "Frequency tuning of a laterally driven microresonator using an electrostatic comb array of linearly varied length," in Proc. TRANSDUCERS, 1997, pp. 113-116.