Micromechanical resonators with integrated optical waveguides for sensing applications

2005 Conference on Lasers and Electro-Optics, CLEO

Volumn 1, Issue , 2005, Pages 761-763

  Pruessner, Marcel W ^a,b   Chuang, Wen Hsien ^a   Amarnath, Kuldeep ^b   Kanakaraju, S ^b   Ghodssi, Reza ^a,b  

^a UNIVERSITY OF MARYLAND   (United States)

^b LABORATORY FOR PHYSICAL SCIENCES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCHEMICAL ENGINEERING; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; OPTICAL WAVEGUIDES; SEMICONDUCTING INDIUM PHOSPHIDE; SENSORS;

BIO-CHEMICAL SENSING; CANTILEVER RESONATORS; MASS DETECTION;

RESONATORS;

EID: 30844433060     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/cleo.2005.201914     Document Type: Conference Paper

References (7)

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