A near-infrared, continuous wavelength, in-lens spectroscopic photon emission microscope system

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Volumn , Issue , 2007, Pages 240-244

  Tan, S L ^a   Toh, K H ^a   Phang, J C H ^a,b   Chan, D S H ^a   Chua, C M ^b   Koh, L S ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b SEMICAPS Corporation   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

INFRARED SPECTROSCOPY; MOSFET DEVICES; PHOTONS; WAVELENGTH;

BACKSIDE SPECTROSCOPY; DISPERSIVE ELEMENTS; OPTICAL EFFECTS; PHOTON EMISSION MICROSCOPES; SILICON FILTERS;

PHOTOELECTRIC MICROSCOPES;

EID: 39749129139     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IPFA.2007.4378092     Document Type: Conference Paper

References (12)

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