High-sensitivity photon emission microscope system with continuous wavelength spectroscopic capability

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1996, Pages 360-365

  Tao, J M ^a   Chim, W K ^a   Chan, D S H ^a   Phang, J C H ^a   Liu, Y Y ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; EMISSION SPECTROSCOPY; FAILURE ANALYSIS; MOSFET DEVICES;

BIAS DEPENDENT SPECTRAL VARIATIONS; CONTINUOUS WAVELENGTH SPECTROSCOPIC CAPABILITY; HIGH SENSITIVITY PHOTON EMISSION MICROSCOPE SYSTEM;

SEMICONDUCTOR DEVICE TESTING;

EID: 0029712499     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)