A Simple, Cost Effective, and Very Sensitive Alternative for Photon Emission Spectroscopy

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn 1997-October, Issue , 1997, Pages 153-157

  Rasras, M ^a   Wolf, Ingrid De ^a   Groeseneken, G ^a   Maes, H E ^a   Vanhaeverbeke, S ^b   De Pauw, P ^b  

^a IMEC   (Belgium)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION SPECTROSCOPY; FAILURE ANALYSIS; SPECTROMETERS; SPECTRUM ANALYSIS;

COST EFFECTIVE; EMISSION MICROSCOPES; FAILURE DETECTION; MECHANICAL PARTS; PHOTO EMISSION; PHOTON EMISSION SPECTROSCOPY; SENSITIVE DETECTOR; SIMPLE++; SYSTEM USE; WAVELENGTH MEASUREMENT;

COST EFFECTIVENESS;

EID: 33749889238     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31399/asm.cp.istfa1997p0153     Document Type: Conference Paper

References (6)

1. J. Kolzer, e. Boit, A. Dallmann, G. Deboy, J. Otto and D.Weinmann, J. Appl. Phys. 71 (11), pp. R23-R41 (1992).
2. Y. Y. Liu, J. M. Tao, D. S. H. Chang, J.C.H. Phang, and W. K. Chim, (IPFA '95), pp. 60-65, (1995).
3. J. M Tao, W.K. Chim, D.S.H. Chan, J.e.H. Phang, and Y.Y. Liu, Proc. IRPS, pp. 360-365 (1996).
4. K. de Kort and P. Damink, Proceeding of the European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF'90), pp. 45-52, (1990).
5. M. Lanzoni, E. Sangiorgi, C. Fiegna, M. Manfredi and B. Ricco, IEEE Trans. Electron Devices Lett., Vol 12, pp. 341-343, (1991).
6. J. Bude, N. Sano and A .Yoshii. Phys. Rev. B, 45 (11), pp. 5848, (1992).