Light Emission Spectral Analysis: The Connection Between the Electric Field and the Spectrum

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 1999, Pages 57-67

  Barton, Daniel L ^a   Tangyunyong, Paiboon ^a   Soden, Jerry M ^a   Henderson, Christopher L ^a   Cole Jr , Edward I ^a   Danz, Rainer ^b   Steiner, Reinhard ^b   Iwinski, Zbigniew ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b CARL ZEISS SMT AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CCD CAMERAS; WAVELENGTH CALIBRATION;

CHARGE COUPLED DEVICES; ELECTRIC FIELDS; ELECTROMAGNETIC WAVE DIFFRACTION; FAILURE ANALYSIS; INTEGRATED CIRCUITS; MOSFET DEVICES; OPTICAL TESTING; RADIATION EFFECTS; SPECTROMETERS; SPECTRUM ANALYSIS;

LIGHT EMISSION;

EID: 0002036812     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. D. L. Barton, P. Tangyunyong, J. M. Soden, A. Y. Liang, F. J. Low, A. N. Zaplatin, K. Shivanandan, and G. Donohoe, ISTFA 96, pp. 9 - 17, 1996.
2. G. Chynoweth and K. G. McKay, Phys. Rev., 102 (2), 369-376, 1956.
3. M. Rasras, I. De Wolf, G. Groeseneken, H. E. Macs, S. Vanhaeverbeke, P. De Pauw, ISTFA 97, pp. 153-157, 1997.
4. J. M. Tao, W. K. Chim, D. S. H. Chan, J. C. H. Phang, and Y. Y. Liu, IRPS 96, pp. 360 - 365, 1996.
5. S. M. Sze, Physics of Semiconductor Devices, John Wiley & Sons, Ch. 2 & Ch. 12, 1981.
6. E. S. Wang, Fundamentals of Semiconductor Devices. McGraw-Hill, Ch. 4, 1978.
7. E. Hect and A. Zajac, Optics. Addison-Wesley, Ch. 9, 1974.
8. E I. Cole, P. Tangyunyong, and D. L. Barton, IRPS 98, pp. 129-136, 1998.