A review of near infrared photon emission microscopy and spectroscopy

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Volumn , Issue , 2005, Pages 275-281

  Phang, J C H ^a,b   Chan, D S H ^a   Tan, S L ^a   Len, W B ^a   Yim, K H ^a   Koh, L S ^b   Chua, C M ^b   Balk, L J ^c  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b SEMICAPS Corporation   (Singapore)

^c UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; FAILURE (MECHANICAL); FAILURE ANALYSIS; INFRARED RADIATION; LIGHT EMISSION; MICROELECTRONICS; MOSFET DEVICES; PHOTONS; SEMICONDUCTOR JUNCTIONS; SPECTROSCOPIC ANALYSIS;

DEFECT CHARACTERIZATION TECHNIQUE; INFRARED PHOTON EMISSION MICROSCOPY; MICROELECTRONIC FAILURE ANALYSIS; PN JUNCTIONS;

EMISSION SPECTROSCOPY;

EID: 28044437113     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)

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