Lateral length scales of latent image roughness as determined by off-specular neutron reflectivity

Applied Physics Letters

Volumn 92, Issue 6, 2008, Pages

  Lavery, Kristopher A ^a   Prabhu, Vivek M ^a   Lin, Eric K ^a   Wu, Wen Li ^a   Satija, Sushil K ^a   Choi, Kwang Woo ^b   Wormington, Matthew ^c  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b INTEL CORPORATION   (United States)

^c Bede Scientific Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EDGE DETECTION; NEUTRON REFLECTION; PHOTOLITHOGRAPHY; PHOTORESISTORS;

IMAGE ROUGHNESS; OFF-SPECULAR NEUTRON REFLECTIVITY; ULTRAVIOLET LITHOGRAPHY PHOTORESIST;

IMAGING TECHNIQUES;

EID: 39349103797     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2841663     Document Type: Article

References (25)

1. D. He and F. Cerrina, J. Vac. Sci. Technol. B JVTBD9 0734-211X 10.1116/1.590401 16, 3748 (1998).
2. W. D. Hinsberg, F. A. Houle, J. Hoffnagle, M. I. Sanchez, G. Wallraff, M. Morrison, and S. Frank, J. Vac. Sci. Technol. B JVTBD9 0734-211X 10.1116/1.590392 16, 3689 (1998).
3. A. Pawloski, A. Acheta, H. Levinson, T. B. Michaelson, A. Jamiesin, Y. Nishimura, and C. G. Willson, J. Microlithogr., Microfabr., Microsyst. JMMMGF 1537-1646 10.1117/1.2200675 5, 023001 (2006).
4. J. Shin, G. Han, Y. Ma, K. Moloni, and F. Cerrina, J. Vac. Sci. Technol. B JVTBD9 1071-1023 10.1116/1.1418413 19, 2890 (2001).
5. G. W. Reynolds and J. W. Taylor, J. Vac. Sci. Technol. B JVTBD9 1071-1023 10.1116/1.590560 17, 334 (1999).
6. J. Shin, Y. Ma, and F. Cerrina, J. Vac. Sci. Technol. B JVTBD9 1071-1023 10.1116/1.1526638 20, 2927 (2002).
7. F. A. Houle, W. D. Hinsberg, and M. I. Sanchez, Macromolecules MAMOBX 0024-9297 10.1021/ma0209702 35, 8591 (2002).
8. F. A. Houle, W. D. Hinsberg, and M. I. Sanchez, J. Vac. Sci. Technol. B JVTBD9 1071-1023 10.1116/1.1688351 22, 747 (2004).
9. P. C. Tsiartas, L. W. Flanagin, C. L. Henderson, W. D. Hinsberg, I. C. Sanchez, R. T. Bonnecaze, and C. G. Willson, Macromolecules MAMOBX 0024-9297 10.1021/ma9707594 30, 4656 (1997).
10. H. Ito, J. Polym. Sci., Part A: Polym. Chem. JPACEC 0887-624X 10.1002/pola.10963 41, 3863 (2003).
11. C. G. Willson, H. Ito, J. Frechet, T. Tessier, and F. Houliham, J. Electrochem. Soc. JESOAN 0013-4651 10.1149/1.2108519 133, 181 (1986).
12. H. Ito, Adv. Polym. Sci. APSIDK 0065-3195 172, 37 (2005).
13. G. M. Wallraff and W. D. Hinsberg, Chem. Rev. (Washington, D.C.) CHREAY 0009-2665 10.1021/cr980003i 99, 1801 (1999).
14. F. A. Houle, W. D. Hinsberg, M. I. Sanchez, and J. A. Hoffnagle, J. Vac. Sci. Technol. B JVTBD9 1071-1023 10.1116/1.1475985 20, 924 (2002).
15. E. K. Lin, C. L. Soles, D. L. Goldfarb, B. C. Trinque, S. D. Burns, R. L. Jones, J. L. Lenhart, M. Angelopoulos, C. G. Willson, S. K. Satija, and W. L. Wu, Science SCIEAS 0036-8075 10.1126/science.1072092 297, 372 (2002).
16. K. A. Lavery, B. D. Vogt, V. M. Prabhu, E. K. Lin, W. L. Wu, S. K. Satija, and K.-W. Choi, J. Vac. Sci. Technol. B JVTBD9 1071-1023 10.1116/1.2375086 24, 3044 (2006).
17. J. A. Dura, D. J. Pierce, C. F. Majkrzak, N. C. Maliszewskyj, D. J. McGillivray, M. Losche, K. V. O'Donovan, M. Mihailescu, U. Perez-Salas, D. L. Worcester, and S. H. White, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.2219744 77, 074301 (2006).
18. P. A. Kienzle, K. V. O'Donovan, J. F. Ankner, N. F. Berk, and C. F. Majkrzak, http://www.ncnr.nist.gov/reflpak (2006).
19. T. P. Russell, Mater. Sci. Rep. MSREEL 0920-2307 10.1016/S0920-2307(05) 80002-7 5, 171 (1990).
20. L. Nevot and P. Croce, Rev. Phys. Appl. RPHAAN 0035-1687 10.1051/rphysap:01980001503076100 15, 761 (1980).
21. S. K. Sinha, E. B. Sirota, S. Garoff, and H. B. Stanley, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.38.2297 38, 2297 (1988).
22. W. L. Wu, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.464284 98, 1687 (1993).
23. V. Holy and T. Baumbach, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.49.10668 49, 10668 (1994).
24. M. Wormington, I. Pape, T. P. A. Hase, B. K. Tanner, and D. K. Bowen, Philos. Mag. Lett. PMLEEG 0950-0839 10.1080/095008396180371 74, 211 (1996).
25. Y. Yoneda, Phys. Rev. PHRVAO 0031-899X 10.1103/PhysRev.131.2010 131, 2010 (1963).