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Applied Physics Letters

Volumn 92, Issue 6, 2008, Pages

Precipitation analysis on P-implanted silicon by reflectivity spectrum

(4) Huang, Shih An a Lo, Kuang Yao a Hsu, Li Hsuan a Hung, Kuang Ming b

a NATIONAL CHIAYI UNIVERSITY (Taiwan)

b NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ION IMPLANTATION; PHOSPHORUS; PRECIPITATION (CHEMICAL); REFLECTION; SPECTRUM ANALYSIS;

PRECIPITATION ANALYSIS; REFLECTIVITY SPECTRUM;

SILICON;

EID: 39349085219 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2839575 Document Type: Article

Times cited : (4)

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