Dopant and carrier concentration in Si in equilibrium with monoclinic SiP precipitates

Physical Review B - Condensed Matter and Materials Physics

Volumn 53, Issue 12, 1996, Pages 7836-7841

  Solmi, S ^a   Parisini, A ^a   Angelucci, R ^a   Armigliato, A ^a   Nobili, D ^b  

^a CNR   (Italy)

^b UNIVERSITY OF BOLOGNA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001813439     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.53.7836     Document Type: Article

References (23)

1. T. Wadsten, Chem. Scr. 8, 63 (1975).
2. J. Osugi, R. Namikawa and J. Tanaka, Rev. Phys. Chem. Jpn. 36, 35 (1966).
3. R. W. Olesinsky, N. Kanani and G. J. Abbaschian, Bull. Alloy Phase Diagrams 6, 130 (1986).
4. A. Armigliato, D. Nobili, M. Servidori and S. Solmi, J. Appl. Phys. 47, 5489 (1977).
5. M. Servidori and A. Armigliato, J. Mater. Sci. 10, 306 (1975).
6. A. Bourret and W. Schröter, Ultramicroscopy 14, 97 (1984).
7. H. Bender, D. Avau, W. Vandervost, J. Van Landuyt, and H. E. Maes, Matter Sci. Forum 10, -12, 1165 (1986).
8. D. Nobili, A. Armigliato, M. Finetti and S. Solmi, J. Appl. Phys. 53, 1484 (1982).
9. E. Fogarassy, R. Stuck, J. C. Muller, A. Grob, J. J. Grob and P. Siffert, J. Electron. Mater. 9, 1977 (1980).
10. D. Nobili, A. Carabelas, G. Celotti and S. Solmi, J. Electrochem. Soc. 130, 922 (1983).
11. D. L. Kendall and R. Carpio (unpublished).
12. R. B. Fair and J. C. C. Tsai, J. Electrochem. Soc. 124, 1102 (1977).
13. M. Finetti, P. Negrini, S. Solmi and D. Nobili, J. Electrochem. Soc. 128, 1313 (1981).
14. M. Servidori, C. Dal Monte and Q. Zini, Phys. Status Solidi A 80, 277 (1983).
15. A. Armigliato and P. Werner, Ultramicroscopy 15, 61 (1984).
16. A. Parisini, D. Nobili, A. Armigliato, M. Derdour, L. Moro and S. Solmi, Appl. Phys. A 54, 221 (1992).
17. D. Nobili, S. Solmi, A. Parisini, M. Derdour, A. Armigliato and L. Moro, Phys Rev. B 49, 2477 (1994).
18. R. B. Fair, in Silicon Integrated Circuits, edited by D. Kahng (Academic, New York, 1981), p. 1.
19. J. L. Katz, H. Salsburg and H. Reiss, J. Colloid Interf. Sci. 21, 560 (1966).
20. R. D. Doherty, in Physical Metallurgy, edited by R. W. Cahn and P. Haasen (North-Holland, Amsterdam, 1983), pp. 934-1029.
21. A. Carabelas, D. Nobili and S. Solmi, J. Phys. (Paris) 43, C187 (1982).
22. G. Masetti, D. Nobili, and S. Solmi, in Semiconductor Silicon 1977, edited by H. R. Ruff and E. Sirtl (Electrochemical Society, Princeton, 1977), p. 648.
23. J. Frenkel, Kinetics Theory of Liquids (Dover, New York, 1955).