Diagnostics of N2-Ar plasma mixture excited in a 13.56 MHz hollow cathode discharge system: Application to remote plasma treatment of polyamide surface

Journal of Physics D: Applied Physics

Volumn 41, Issue 4, 2008, Pages

  Saloum, S ^a   Naddaf, M ^a   Alkhaled, B ^a  

^a DEPARTMENT OF MOLECULAR BIOLOGY AND BIOTECHNOLOGY   (Syrian Arab Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CATHODES; CONTACT ANGLE; NITROGEN COMPOUNDS; OPTICAL EMISSION SPECTROSCOPY; PLASMA ETCHING; PLASMAS; SURFACE TREATMENT;

BAND EMISSION; PLASMA GAS MIXTURE; PLASMA TREATMENT; POLYMER ETCHING;

POLYAMIDES;

EID: 38949161845     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/4/045205     Document Type: Article

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