Optical emission characteristics of glow discharge in the N2-H2-Sn(CH3)4 and N2-Ar-Sn(CH3)4 mixtures

Surface and Coatings Technology

Volumn 201, Issue 3-4, 2006, Pages 1444-1453

  Jamroz, P ^a   Zyrnicki, W ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Glow discharge; Optical emission spectroscopy; PACVD; Plasma diagnostics; Tetramethyltin; X ray diffraction

Indexed keywords

DECOMPOSITION; GLOW DISCHARGES; LIGHT EMISSION; MIXTURES; PLASMA DIAGNOSTICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TEMPERATURE; TIN COMPOUNDS; VIBRATIONS (MECHANICAL); X RAY DIFFRACTION ANALYSIS;

NITROGEN-ARGON-TETRAMETHYLTIN MIXTURES; NITROGEN-HYDROGEN-TETRAMETHYLTIN; OPTICAL ACTINOMETRY; OPTICAL EMISSION SPECTROSCOPY; OPTICAL TEMPERATURES;

NITROGEN COMPOUNDS;

DECOMPOSITION; GLOW DISCHARGES; LIGHT EMISSION; MIXTURES; NITROGEN COMPOUNDS; PLASMA DIAGNOSTICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TEMPERATURE; TIN COMPOUNDS; VIBRATIONS (MECHANICAL); X RAY DIFFRACTION ANALYSIS;

EID: 33748533815     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.02.013     Document Type: Article

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