Precise control of atomic nitrogen production in an electron cyclotron resonance plasma using N2/noble gas mixtures

Applied Physics Letters

Volumn 73, Issue 4, 1998, Pages 456-458

  Fan, Z Y ^a   Newman, N ^a  

^a Northwestern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000894797     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121898     Document Type: Article

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